二氯二氢硅的安全生产  

Safe Production of Dichlorodihydrosilane

作　　者：李云昊 赵国伟 郭树虎 赵宇[1,2] 常欣 赵雄 Li Yun-hao;Zhao Guo-wei;Guo Shu-hu;Zhao Yu;Chang Xin;Zhao Xiong

机构地区：[1]洛阳中硅高科技有限公司,河南洛阳471023 [2]多晶硅制备技术国家工程实验室,河南洛阳471023 [3]中国恩菲工程技术有限公司,北京100038

出　　处：《化工设计通讯》2020年第8期167-168,共2页Chemical Engineering Design Communications

基　　金：郑洛新国家自主创新示范区创新引领型产业集群专项(18100212700)。

摘　　要：二氯二氢硅在半导体行业有广泛的应用,是一种重要的电子级硅基原料,但是二氯二氢硅在生产、充装、仓储、运输、使用的过程中有较大的安全风险。重点介绍了二氯二氢硅用途前景以及在制造前期和制造过程中所面临的安全问题,从工艺设计、选址、物料输送、生产管控、储存以及充装、副产品处理等方面,进行全方位安全分析,并采取有效的防范措施,将安全风险控制在可控范围之内,提升了二氯二氢硅的安全生产水平,确保二氯二氢硅可以安全地应用于半导体行业,顺利推进二氯二氢硅的国产化。Dichlorodihydrosilane silicon is widely used in the semiconductor industry and is an important electronic grade silicon-based raw material.However,Dichlorodihydrosilane silicon has greater safety in the production,filling,storage,transportation,and use processes.risk.Highlighted the application prospects of dichlorodihydrosilane and the safety issues faced in the pre-manufacturing and manufacturing process,from the aspects of process design,site selection,material transportation,production control,storage and filling,by-product processing,etc.Safety analysis and take effective preventive measures to control safety risks within a controllable range,improve the safe production level of dichlorodihydrosilane,ensure that dichlorodihydrosilane can be safely applied to the semiconductor industry,and smoothly promote the second Localization of chlorodihydrosilane.

关 键 词：二氯二氢硅 易燃易爆 副产物 安全生产 

分 类 号：TQ127.2[化学工程—无机化工]