半透明Cu2O/ZnO异质结的制备及其光电性能研究  

Preparation and Optoelectronic Properties of Semi-transparent CuO/ZnO Heterojunction

作　　者：李金珠 田爱玲 刘丙才 王红军 朱学亮 LI Jin-zhu;TIAN Ai-ling;LIU Bing-cai;WANG Hong-jun;ZHU Xue-liang(Shaanxi Province Key Laboratory of Optical Information Science and Technology,School of Photoelectric Engineering,Xi'an Technological University,Xi'an 710021,China)

机构地区：[1]西安工业大学光电工程学院陕西省薄膜技术与光学检测重点实验室,西安710021

出　　处：《光子学报》2020年第8期199-204,共6页Acta Photonica Sinica

基　　金：陕西省教育厅项目(No.17JS048);陕西省科技厅项目(No.2019KW-016)。

摘　　要：为研究具有更好材料稳定性的半透明薄膜太阳能电池,本文采用直流磁控溅射技术沉积氧化亚铜(Cu2O)薄膜和氧化锌(ZnO)薄膜,制备了Cu2O/ZnO异质结.使用扫描电镜、X射线衍射仪、拉曼光谱仪、薄膜测定系统和太阳能模拟器,研究在不同氩/氧气体流量比的条件下制备的Cu2O层对异质结的材料特性、光学特性及光电特性的影响.研究结果表明:在一定氩/氧气体流量比范围内制备的Cu2O/ZnO异质结,在AM1.5的标准模拟太阳光的照射下具有一定的光电转换能力,可作为半透明太阳能电池的换能单元.In order to study the semi-transparent thin film solar cell with better material stability,use direct current magnetron sputtering technique to deposit cuprous oxide(Cu2O)thin film and zinc oxide(ZnO)thin film,forming the Cu2O/ZnO heterojunction.By using scanning electron microscope,X-ray diffractometer,raman spectrometer,thin film measurement instrument and solar simulator,the influence caused by Cu2O layer prepared under different Ar/O2 gas flow ratio on material properties,optical properties and photoelectric properties of heterojunction is studied.Results show that the Cu2O/ZnO heterojunctions produced under the certain Ar/O2 gas flow ratios have certain photoelectric conversion ability under the standard simulated sunlight of AM1.5,which can be used as the energy conversion unit of the semi-transparent solar cell.

关 键 词：半透明太阳能电池 异质结 磁控溅射 氧化锌薄膜 氧化铜薄膜 

分 类 号：O475[理学—半导体物理]