MEMS微机械结构受冲击力学分析  

Mechanical analysis of shock on MEMS micro-mechanical structure

作　　者：高成[1] 王怡豪 傅成城 黄姣英[1] 王长鑫 GAO Cheng;WANG Yihao;FU Chengcheng;HUANG Jiaoying;WANG Changxin(School of Reliability and Systems Engineering,Beijing University of Aeronautics and Astronautics,Beijing 100191,China;Systems Engineering Research Institute,Beijing 100094,China)

机构地区：[1]北京航空航天大学可靠性与系统工程学院,北京100191 [2]中国船舶工业系统工程研究所,北京100194

出　　处：《传感器与微系统》2020年第9期9-12,15,共5页Transducer and Microsystem Technologies

基　　金：军用电子元器件科研项目(1807WK0002)。

摘　　要：对微机电系统(MEMS)加速度传感器ADXL203的微机械结构建立三维模型,使用卡式定理与线性弹性理论推导折叠梁X,Y,Z方向刚度,并利用ANSYS有限元仿真验证了刚度计算结果。求解结构阻尼系数,由阻尼受迫振动模型入手,采用准静态理论或振动理论,分析微机械结构在冲击脉冲下的响应规律,推导出在半正弦波冲击条件下,微机械结构的运动方程。计算得到微机械结构在X,Y方向最大位移为0.883,0.8786 mm,分别在冲击发生后的0.141,0.142 ms时。提出了微机械结构刚度、阻尼、运动方程的求解方法,便于分析其失效机理,指导MEMS冲击试验的进行。Three-dimensional(3 D)model for micro-mechanical structure(MMS)of micro-electro-mechanical system(MEMS)acceleration sensor ADXL 203 is set up.Castigliano Theorem and linear elasticity theory are used to derive the stiffness of folding beams in X,Y,and Z directions.And the stiffness calculation results are verified by ANSYS.Then the damping coefficients of MMS are solved.Finally,based on the damped forced vibration model,the response rule of MMS under shock pulse is analyzed by quasi-static theory or vibration theory.And the motion equation of MMS under the condition of half sine wave shock is derived.The maximum displacement of the structure in X and Y directions is 0.883 mm and 0.8786 mm,respectively.0.883 mm occurs at 0.141 ms and 0.8786 mm occurs at 0.142 ms after shock.A solving method of stiffness,damping and motion equations of MMS is proposed,which is convenient for analyzing on failure mechanism and guiding the shock test of MEMS.

关 键 词：微机电系统 折叠梁 刚度 阻尼 冲击 运动方程 

分 类 号：O313.4[理学—一般力学与力学基础] TN403[理学—力学]