一种静电驱动微机械元件的结构模型  

Structural model of electrostatically actuated micromechanical component

作　　者：殷玲[1] 陈非凡[1] 李云龙[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《清华大学学报（自然科学版）》2002年第11期1466-1468,共3页Journal of Tsinghua University(Science and Technology)

基　　金：国家自然科学基金资助项目(69978008);教育部高等学校骨干教师资助计划资助项目

摘　　要：静电驱动的微机械装置是许多微机电系统(MEMS)中的重要模块。根据微光机电系统(MOEMS)可编程相位光栅的设计思想,提出一种静电驱动的微机械元件(微梁)作为可编程光栅的基本结构元件,并以ANSYS软件的有限元分析为依据,对其结构模型作较深入的研究,探讨了各主要结构参数及控制电压对结构驱动性能的影响。结果表明,在设计尺度范围内,微梁主要结构参数按照对光带变形的影响大小排列分别为微梁厚度、微梁变形前与衬底间的距离及微梁长度.Electrostatically actuated micromechanical devices are widely used in microelectromechanical systems (MEMS). An electrostatically actuated micromechanical beam was developed as the basic structural unit of a programmable phase grating based on microoptoelectromechanical systems (MOEMS). The mechanics of the micromechanical component was analyzed using the ANSYS finite element package to show the effect of the main structural parameters and control voltages on the actuated performance of the structure. For typical beam dimensions, the beam deflection is most sensitive to the beam thickness, then to the distance from the bottom of the undeflected beam to the substrate, and then to the beam length.

关 键 词：微机械元件 结构模型 可编程相位光栅 微机电系统 有限元分析 静电驱动 驱动性能 

分 类 号：TN4[电子电信—微电子学与固体电子学] TH-39[机械工程]