多编程手段的浮栅晶体管非易失性存储器  

Floating gate transistor non-volatile memory with multi-programming method

作　　者：温嘉敏 闫成员 孙振华 WEN Jiamin;YAN Chengyuan;SUN Zhenhua(College of Physics and Optoelectronic Engineering,Shenzhen University,Shenzhen 518060,Guangdong Province,P.R.China)

机构地区：[1]深圳大学物理与光电工程学院,广东深圳518060

出　　处：《深圳大学学报（理工版）》2021年第3期232-238,共7页Journal of Shenzhen University(Science and Engineering)

基　　金：广东省自然科学基金资助项目(2019A1515011367,2016A030310055)。

摘　　要：随着信息时代的发展,新型晶体管基非易失性存储器体现出越来重要的应用价值,获得了广泛的研究关注.本研究将具有Ⅰ型能带结构的硒化锌/硫化锌核壳量子点集成到石墨烯晶体管中,充当晶体管中的电荷捕获层和隧穿中心,制备具有多重编程手段的非易失性存储器.该量子点可以实现电子和空穴的双重存储,通过正负脉冲栅压可以改变该器件的沟道电导状态,实现信息存储.表征实验结果表明,该器件可实现60 V的超大存储窗口,在10 h的测试范围内表现出良好稳定性,在多次擦写过程中表现出良好的耐用性.该器件还可以将光照作为辅助编程手段,使用紫外光对写入的电荷进行擦除,实现较好的电写-光擦功能.研究结果表明,核壳量子点是一种良好的电荷存储介质,在晶体管基非易失性存储器中具有巨大应用潜力,对基于半导体核壳量子点的晶体管基存储器进行光电赋能,有望实现光电编程.With the development of the information age,novel transistor-based non-volatile memories have demonstrated more and more application potential,and thus attract extensive attention and investigation.In this paper,the zinc selenide/zinc sulfide core-shell quantum dots(ZnSe@ZnS QDs)with type-I energy band structure,which act as charge-trapping and tunneling centers,are integrated into a graphene transistor,rendering a non-volatile memory with multiple programming methods.The quantum dots are able to storage both electrons and holes so that the channel conductance of the graphene transistor can be adjusted by either positive or negative pulse gate voltage for information storage.A battery of characterizations show that the device has a large storage windows of 60 V,a good retention performance in 10 h test range and an excellent endurance performance in the process of multiple writing and erasing.In addition,this device can also use light illumination as an auxiliary programming method,where ultraviolet light is used to erase the written charge,demonstrating a benign electrically writing-optically erasing function.This work shows that the core-shell QDs are good charge storage media and have great application potential in transistor-based non-volatile memories.At the same time,due to the excellent optoelectronic properties of semiconductor QDs,applying QDs in memories can empower the device with optoelectronic programming functionality.

关 键 词：纳米材料 核壳量子点 光电晶体管 非易失性存储器 光电存储器 石墨烯晶体管 高介电常数材料 

分 类 号：TN36[电子电信—物理电子学] O47[理学—半导体物理]