上海光源溅射离子泵性能测试  

Ion Pump Performance Test Used by Shanghai Synchrotron Radiation Facility

作　　者：李波[1,2] 刘俊男 张敏[1,2] 薛松 陈明[1,2] LI Bo;LIU Jun-nan;ZHANG Min;XUE Song;CHEN Ming(Shanghai Institute of Applied Physics,Chinese Academy of Science,Shanghai 201800,China;Shanghai Advanced Research Institute,Chinese Academy of Sciences,Shanghai 201204,China)

机构地区：[1]中国科学院上海应用物理研究所,上海201800 [2]中国科学院上海高等研究院,上海201204

出　　处：《真空》2021年第3期13-16,共4页Vacuum

基　　金：高性能离子泵在同步辐射装置上的应用开发与示范(2017YFF0105803)。

摘　　要：本文详细介绍了上海光源常用溅射离子泵性能测试的方法和原理,并对极限真空度,有效抽速,洁净度进行了测试。结果表明,溅射离子泵的极限真空度测量值都满足≤5.0×10^(-8)Pa的指标要求。SIP200和SIP400的氮气再生抽速最大值均超过了各自的名义抽速,对惰性气体(氩气)的饱和抽速最大值也超过了名义抽速的60%。通过四极质谱计测得的残气谱图得出溅射离子泵的洁净度达到了上海光源光束线的洁净要求。经过测试的溅射离子泵安装到光束线上均能正常工作,动态真空满足设计指标。This article introduced the test methods of ion pump performance for Shanghai Synchrotron Radiation Facility.The ultimate vacuum,effective pumping speed and cleanliness of ion pump were investigated.The study showed that the measured values of the ultimate vacuum of the ion pump meet the requirements of≤5.0×10^(-8)Pa.The SIP200 and SIP400 both had a maximum nitrogen regeneration pumping rate in excess of their respective nominal pumping rates.The saturation pumping speed of the inert gas argon also exceeded 60%of their respective nominal pumping rates.The residual gas spectra measured by the quadrupole mass spectrometer indicated that the cleanliness of the ion pump meets the cleanliness requirements of the beamline of Shanghai Synchrotron Radiation Facility.The tested ion pump,installed on the beamline,works properly and the dynamic vacuum meets the vacuum design specifications.

关 键 词：同步辐射 超高真空 溅射离子泵 极限真空度 抽速 残气谱图 

分 类 号：TL503.7[核科学技术—核技术及应用]