一种用于MEMS陀螺仪的隔振平台及其结构设计  

A vibration isolation platform and its structure design for MEMS gyroscope

作　　者：许高斌[1] 杨海洋 王超超 马渊明[1] 陈兴[1] XU Gaobin;YANG Haiyang;WANG Chaochao;MA Yuanming;CHEN Xing(School of Electronic Science and Applied Physics, Hefei University of Technology, Hefei 230601, China)

机构地区：[1]合肥工业大学电子科学与应用物理学院,安徽合肥230601

出　　处：《合肥工业大学学报（自然科学版）》2021年第8期1065-1072,共8页Journal of Hefei University of Technology：Natural Science

基　　金：装备预研教育部联合基金资助项目(JD2018XAZC0009);安徽省重点研发计划资助项目(1804a09020018)。

摘　　要：为隔离外部环境振动对MEMS陀螺仪性能造成的不利影响,文章设计了一种用于MEMS陀螺仪隔振的单层及双层隔振平台,通过理论分析隔振平台结构参数对隔振性能以及集成隔振平台对MEMS陀螺仪性能的影响,确立隔振平台的设计准则;设计了一种用于MEMS陀螺仪的单层及双层隔振结构及其制备工艺流程,通过ANSYS仿真分析隔振平台结构设计的可靠性及合理性。对1个示例MEMS陀螺仪进行分析,结果表明所设计的单层及双层隔振平台结构合理可靠且均可隔离外界环境振动,通过增大第1层隔振平台质量不仅可以提高隔振效果还可有效降低集成隔振平台对MEMS陀螺仪性能的影响。采用设计的隔振平台结构与工艺流程可实现陀螺仪与隔振平台的圆片级封装,并可采用MEMS的加工工艺大批量生产,降低隔振成本。In order to isolate the influence of external environment vibration on MEMS gyroscope,the single and double layer vibration isolation platforms for MEMS gyroscope are designed.Through theoretical analysis,the influence of vibration isolation platform structural parameters on the isolation performance and that of integrated isolation platform on the MEMS gyroscope are analyzed,and the design rules for vibration isolation platforms are established.The structure of the vibration isolation platforms for MEMS gyroscope and its fabrication process are designed.The reliability and rationality of the structure design of the vibration isolation platforms are analyzed by ANSYS simulation.A gyroscope is used as example for vibration isolation in this paper,the results show that the designed single and double-layer platforms are reasonable and reliable,and can isolate the external environmental vibration,and by increasing the mass of the first vibration isolation platform,not only can the vibration isolation effect be improved,but also the influence of the integrated isolation platform on the performance of the MEMS gyroscope can be effectively reduced.Adopting the designed structures and fabrication process of the vibration isolation platform can realize the wafer level package of gyroscope and vibration isolation platform,and the fabrication technology of MEMS can also be used in mass production to reduce vibration isolation cost.

关 键 词：MEMS陀螺仪 隔振平台 理论模型 制备工艺 仿真分析 

分 类 号：TB535.1[理学—物理] U666.123[理学—声学]