溶胶-凝胶法制备PZT薄膜研究进展  

Research Progress of PZT Thin Films Fabricated by Sol-Gel Method

作　　者：刘立崴 周闯 丁江 LIU Liwei;ZHOU Chuang;DING Jiang(College of Mechanical Engineering, Guangxi University, Nanning 530004, China;The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China;Guangxi Key Laboratory of Manufacturing System & Advanced Manufacturing Technology, Nanning 530004, China)

机构地区：[1]广西大学机械工程学院,广西南宁530004 [2]中国电子科技集团公司第二十六研究所,重庆400060 [3]广西制造系统与先进制造技术重点实验室,广西南宁530004

出　　处：《压电与声光》2021年第4期566-572,共7页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(No.51905113);广西自然科学基金资助项目(No.2017GXNSFBA198233);广西研究生教育创新计划基金资助项目(No.YCSW2020018)。

摘　　要：随着微机电系统(MEMS)产业的快速发展,铁电薄膜材料作为微机电器件的重要组成部分而愈受重视。锆钛酸铅(PZT)薄膜具有优越的压电性、热释电性及光电性等性能,在微电子、压电、光学及半导体等领域展现了巨大的应用潜力。因此,高性能PZT薄膜的制备技术及制备工艺一直备受关注。其中,溶胶-凝胶法因具有易于控制成分,所需设备成本低及制备薄膜的均匀性好等优点而被广泛用于PZT薄膜制作中。该文在溶胶-凝胶法基本原理及制作工艺的基础上,着重分析了溶胶-凝胶法制备PZT薄膜的研究现状,总结了当前溶胶-凝胶法的技术特点,并指出了研究中存在的不足及未来的潜在改进方向。With the rapid development of micro-electro-mechanical-system(MEMS)industry,the ferroelectric thin films,as an important part of MEMS devices,have attracted more and more attention.The lead zirconate titanate(PZT)thin films have shown great potential to be applied in microelectronics,piezoelectric industry,optics,semiconductors and other fields due to their excellent piezoelectricity,pyroelectricity and photoelectricity.Therefore,the fabrication technologies of high performance PZT thin films have always attracted much attention.Among them,the Sol-Gel method is widely used in the preparation of PZT films because of its advantages of easy control of the composition,low equipment cost and good uniformity.In this paper,based on the brief introduction to the principles and fabrication methods of the Sol-Gel method,the research status of PZT thin films prepared by Sol-Gel method is emphatically analyzed.The technical characteristics of the Sol-Gel method are summarized,and the shortcomings in the existing research as well as the potential improvements in the future are pointed out.

关 键 词：微机电系统 铁电薄膜 铁电性能 PZT薄膜 溶胶-凝胶法 

分 类 号：TN304.9[电子电信—物理电子学] TM223[一般工业技术—材料科学与工程]