集成电路光刻工艺虚拟仿真实验教学建设  

Construction of virtual simulation experiment teaching for integrated circuit lithography process

作　　者：兰馗博 赵毅强 张宁[1,2] 程思璐 秦国轩[1,2] LAN Kuibo;ZHAO Yiqiang;ZHANG Ning;CHENG Silu;QIN Guoxuan(School of Microelectronics,Tianjin University,Tianjin 300072,China;Tianjin Key Laboratory of Imaging and Sensing Microelectronic Technology,Tianjin University,Tianjin 300072,China)

机构地区：[1]天津大学微电子学院,天津300072 [2]天津大学天津市成像与感知微电子技术重点实验室,天津300072

出　　处：《实验室科学》2021年第4期145-148,153,共5页Laboratory Science

基　　金：教育部产学合作协同育人项目(项目编号:201801142008);天津市虚拟仿真实验教学建设项目(项目编号:201977);天津大学示范性虚拟仿真实验教学项目(项目编号:TJUXF20180205)。

摘　　要：针对集成电路工艺实验教学中存在的大型设备短缺、场地经费受限、实验条件苛刻等问题,提出了搭建具备选课、资源库、答疑室和教学评价等功能的开放式教学管理信息化平台。阐述了集成电路光刻工艺在虚拟仿真技术中的典型应用,充分发挥了虚拟仿真实验的生动、直观、安全等优点,激发了学生学习的积极性和主动性,培养了学生的创新精神和工程实践能力,满足了新工科背景下的金课建设需求。According to solve the problems of equipment shortage,limited site or funds and harsh experimental conditions in integrated circuit technology fabrication teaching,an open teaching management information platform is building with functions of course selection,resource database,question-answering room and teaching evaluation.This paper expounds the typical application of integrated circuit lithography process in virtual simulation technology.It gives full play to the advantages of vivid,intuitive and safe for virtual simulation experiment,and inspires the students’learning enthusiasm and initiative.It also cultivates the students’innovative spirit and engineering practice ability,which ultimately achieves the goal of gold class construction base on the emerging engineering.

关 键 词：集成电路 光刻 虚拟仿真 实践教学 新工科建设 

分 类 号：G42[文化科学—课程与教学论]