电容式MEMS加速度计电子辐照效应研究  

Electron irradiation effects in capacitive MEMS accelerometer

作　　者：刘超铭[1,2] 蒋礼达 刘国文 马国亮[1] 王天琦[1] 孙凤云[3] 霍明学 LIU Chaoming;JIANG Lida;LIU Guowen;MA Guoliang;WANG Tianqi;SUN Fengyun;HUO Mingxue(Laboratory for Space Environment and Physical Sciences,Harbin Institute of Technology,Harbin 150001,China;School of Materials Science and Engineering,Harbin Institute of Technology,Harbin 150001,China;College of Electronics Engineering,Heilongjiang University,Harbin 150080,China;School of Aeronautics and Astronautics,Zhejiang University,Hangzhou 310058,China;Beijing Institute of Control Engineering,Beijing 100094,China)

机构地区：[1]哈尔滨工业大学空间环境与物质科学研究院,哈尔滨150001 [2]哈尔滨工业大学材料科学与工程学院,哈尔滨150001 [3]黑龙江大学电子工程学院,哈尔滨150080 [4]浙江大学航空航天学院,杭州310058 [5]北京航天控制仪器研究所,北京100094

出　　处：《黑龙江大学自然科学学报》2021年第4期481-488,共8页Journal of Natural Science of Heilongjiang University

基　　金：国家自然科学基金资助项目(11775061)。

摘　　要：随着我国航天工程的技术发展,对航天器用惯性器件的小型化和轻量化的需求越来越高,研究微电子机械系统(Micro electromechanical system,MEMS)惯性器件的空间环境效应以保障其在轨长寿命和高可靠运行就显得尤为重要。针对国产电容式MEMS加速度计,通过1 MeV电子辐射试验,研究了高能电子辐照对电容式MEMS加速度计电学性能的影响规律及相关退化机理。结果表明,电子辐照注量对电容式MEMS加速度计的表头电容影响较弱、阻抗与辐照注量呈负相关趋势;在低辐照注量下,电容式MEMS加速度计的ASIC电路正常工作,在高辐照注量下(3.0×10^(13) cm^(-2)以上)出现明显的性能退化;电容式MEMS加速度计整表在5.0×10^(12) cm^(-2)的电子辐照注量下发生功能失效。With the technological development of China’s aerospace engineering,the demand for miniaturization and lightweight of inertial devices used in spacecraft is increasingly high.Therefore,it is of great importance to study the space environment effect of Micro electromechanical system(MEMS)and MEMS inertial devices to ensure their long in-orbit life and high reliable operation.The effects of high-energy electron irradiation on the electrical properties of capacitive MEMS accelerometer and the related degradation mechanism are studied by 1 MeV electron irradiation test.The results show that the influence of electron irradiation amount on the capacitance of MEMS accelerometer is weak,and the impedance has a negative correlation with the irradiation amount.The ASIC circuit of the capacitive MEMS accelerometer works normally at low irradiation dose,but has obvious performance degradation at high irradiation dose(above 3.0×10^(13) cm^(-2)).Capacitive MEMS accelerometer fails under electron irradiation with injection of 5.0×10^(12) cm^(-2).

关 键 词：微电子机械系统 电容式加速度计 电子辐照 电压特性 

分 类 号：TN42[电子电信—微电子学与固体电子学]