电磁驱动柔顺微定位平台闭环频域逆迭代学习控制  

Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform

作　　者：张旭 赖磊捷 李朋志[2,3] 朱利民 ZHANG Xu;LAI Lei-jie;LI Peng-zhi;ZHU Li-min(School of Mechanical and Automotive Engineering,Shanghai University of Engineering Science,Shanghai 201600,China;Changchun Institute of Optic,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;School of Computing and Engineering,University of Gloucestershire,Cheltenham,GL502RH,UK;State Key Laboratory of Mechanical System and Vibration,School of Mechanical Engineering,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]上海工程技术大学机械与汽车工程学院,上海201600 [2]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [3]格鲁斯特大学计算与工程学院,英国切尔滕纳姆G L502RH [4]上海交通大学机械与动力工程学院机械系统与振动国家重点实验室,上海200240

出　　处：《光学精密工程》2021年第9期2149-2157,共9页Optics and Precision Engineering

基　　金：国家自然科学基金联合基金重点支持项目(No.U2013211);国家自然科学基金青年科学基金项目(No.51605275);上海自然科学基金资助项目(No.21ZR1426000)。

摘　　要：为了克服音圈电机电磁驱动柔顺微定位平台在大行程范围内存在的低阻尼谐振和动力学特性差异等问题,利用综合数据驱动频域逆迭代前馈补偿和含相位超前校正PI反馈控制的复合闭环频域逆迭代学习控制方法对其进行高速高精控制。首先,搭建了音圈电机驱动双平行四边形柔性机构微定位系统,并针对不同工作点位进行了动力学模型辨识。然后,为提高系统相对稳定性,设计了含相位超前校正环节的PI反馈控制器。同时,利用输入输出数据对系统频响函数进行在线逆估计并进行前馈补偿,来进一步消除谐振的影响。最后,利用所提出的控制方法进行了跟踪实验并与其它方法进行了对比。实验结果表明,提出的控制方法对三角波期望轨迹的最大跟踪误差为0.175%,相比于PID控制、相位超前PI控制、传递函数逆模型前馈控制,跟踪均方根误差分别减少了8.75,5.43和2.21倍,能够较好满足大行程微纳米定位跟踪精度高、速度快、抗干扰能力强的要求。To overcome the problems of low damping resonance and different dynamics properties in the large-range compliant micro-positioning stage driven by a voice coil motor,a compound closed-loop fre⁃quency-domain inverse iterative learning control method based on data-driven frequency-domain inverse it⁃erative feedforward compensation and PI feedback control with phase-lead compensation is used for highspeed and high-precision control.First,the micro-positioning stage with a double-parallelogram flexure mechanism driven by a voice coil motor is built,and a dynamics model is identified for different working positions.Then,a PI feedback controller with phase-lead compensation is designed to improve the relative stability of the positioning system.Input and output data are then used for online inverse estimation of the system frequency response function,which can be used as feedforward compensation to further eliminate the resonance effect.Finally,tracking experiments are conducted using the proposed control method,which is then compared with other methods.Experimental results show that the maximum tracking error for the triangular trajectory using the proposed control method is 0.175%.Compared with a PID control,phase-leading PI control,and transfer function inverse feedforward control,the root mean square errors of tracking are reduced by 8.75,5.43,and 2.21 times,respectively,which can better meet the require⁃ments of high tracking accuracy,fast speed,and strong anti-interference ability of large stroke micro/nanopositioning.

关 键 词：音圈电机 微定位平台 柔性机构 相位超前 频域逆迭代 

分 类 号：TP29[自动化与计算机技术—检测技术与自动化装置]