精密微小装配中的传感器与测量技术  

Sensors and Measurement Technology for Assembly of Miniature Devices

作　　者：王晓东[1] WANG Xiaodong(School of Mechanical Engineering,Dalian University of Technology,Dalian 116023,China)

机构地区：[1]大连理工大学机械工程学院,辽宁大连116023

出　　处：《计测技术》2021年第5期9-22,共14页Metrology & Measurement Technology

基　　金：辽宁省“兴辽英才计划”项目资助(XLYC2002020);国家部委基础科研计划重大项目(JCYK 2016205 A003)。

摘　　要：高性能精密微小器件或产品的零件及其关键结构尺寸微小,因此在制造过程的装配环节,需借助基于传感器与测量技术的精密微小装配以保证装配精度。在微小零件装配过程中,需要精确测量待装配零件之间的相对位置和姿态的偏差,控制配合零件之间的接触力或接触状态。文章对用于精密微小装配的传感器技术进行了概述,结合精密微小装配中的应用需求,对机器视觉、力觉等主要传感器与测量技术进行了综述,并分析了精密测量与装配控制的技术与方法,旨在对精密装配相关的技术开发、装配设备研制提供参考和借鉴。As the high-performance precision miniature devices,product parts and their key structures are small in size,it is necessary to adopt micro assembly technology which is based on sensors and measurement technology during the assembly stage of manufacturing,so as to ensure assembly accuracy.During assembly,the deviation of the position and orientation between the mating parts need to be precisely measured,and the contact force and state need to be controlled.Firstly,the sensor technology for assembly of miniature devices is briefly described,and then with the application requirement of precision assembly of miniature devices taken into account,vision sensor,micro force senor and other main sensors,as well as measurement technology are reviewed.Lastly,precision measurement method and assembly control techniques are analyzed.This paper is aimed at providing reference for the development of precision assembly technology and assembly equipment.

关 键 词：精密装配 微装配 微小器件 精密测量 视觉传感器 微力传感器 

分 类 号：TB92[一般工业技术—计量学] TH703.8[机械工程—测试计量技术及仪器]