柔性X-Y-Z-θz四自由度位移传感器的静态解耦方法研究  

Research on Static Decoupling Method of Flexible X-Y-Z-θ;Four-Degree-of-Freedom Displacement Sensor

作　　者：祖洪飞 潘奔 彭来湖[1] ZU Hongfei;PAN Ben;PENG Laihu(School of Mechanical Engineering&Automation,Zhejiang Sci-Tech University,Hangzhou Zhejiang 310018,China)

机构地区：[1]浙江理工大学机械与自动控制学院,浙江杭州310018

出　　处：《传感技术学报》2022年第1期99-106,共8页Chinese Journal of Sensors and Actuators

基　　金：浙江省自然科学基金资助项目(LQ20E050020);2020年度浙江省博士后科研择优资助项目(ZJ2020102);浙江省重点研发计划(2019C01038);浙江理工大学科研启动基金项目(18022219-Y);浙江理工大学青年创新专项(20022119-Y)。

摘　　要：多维位移间的耦合是影响柔性四自由度位移传感器测量精度的重要因素,另外由于材料的高弹性,使传感器存在较大的迟滞以及一定的非线性,进一步影响了测量精度。针对以上问题,本文首先提出采用对传感器正反行程分别进行静态解耦的方法来解决迟滞的问题;其次,通过对三种常用解耦算法的分析比较,得出基于耦合误差建模的静态解耦算法适用于四自由度位移传感器的解耦,并在其线性的理论基础上推导得到了适合文中使用的四自由度位移传感器的非线性模型。结果表明,在使用基于耦合误差建模的静态非线性解耦算法后四自由度位移传感器的Ⅱ类误差降低了大约2~16倍,测量精度得到有效提高。The coupling between multi-dimensional displacements is a critical factor affecting the measurement accuracy of flexible four degree of freedom displacement sensor. In addition, due to the high elasticity of the material, the sensor has large hysteresis and certain nonlinearity, which further affects the measurement accuracy. In response to the above problems, this paper first proposes a static decoupling method to solve the hysteresis problem;Secondly, through the analysis and comparison of three commonly used decoupling algorithms, it is obtained that the static decoupling algorithm based on coupling error modeling is suitable for four-degree-of-freedom displacement sensors. And on the basis of its linear theory, a nonlinear model suitable for the four-degree-of-freedom displacement sensor used in this work is deduced. The results show that after using the static nonlinear decoupling algorithm based on coupling error modeling, the type II error of the four-degree-of-freedom displacement sensor is reduced by about 2 to 16 times, and the measurement accuracy is effectively improved.

关 键 词：位移传感器 多自由度 静态解耦 非线性 耦合误差建模 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]