Silvaco TCAD仿真在《微电子工艺》实验教学中的应用  

Application of Silvaco TCAD Simulation in Experimental Teaching of Microelectronic Technology

作　　者：于文娟 董可秀[1] 王炳庭[1] 周昌海 付翔[1] 胡毅 Yu Wenjuan;Dong Kexiu;Wang Bingting;Zhou Changhai;Fu Xiang;Hu Yi(Chuzhou University,Chuzhou 239000,China)

机构地区：[1]滁州学院,安徽滁州239000 [2]滁州学院机械与电气工程学院,安徽滁州239000

出　　处：《廊坊师范学院学报（自然科学版）》2022年第4期118-121,128,共5页Journal of Langfang Normal University(Natural Science Edition)

基　　金：安徽省教学研究重点项目(2021jyxm1046);线上线下混合式课程(2021xsxxkc209);安徽省省级一般教学研究项目(2021jyxm1063);校企合作实践教育基地(2020sjjd086)。

摘　　要：为支撑微电子工艺实验课程建设,采用Silvaco TCAD半导体工艺及器件仿真软件,加强学生对微电子工艺中氧化、掺杂、离子注入、光刻等工艺的直观理解,搭建了从网格建设、工艺仿真、PN结分析到NMOS器件全工艺流程设计的系统化仿真实例,让学生在熟悉半导体器件基本结构、载流子参数等性能的同时,深刻理解微电子器件的工艺过程。软件仿真直观的图形展现,既可加深学生课程知识理解,又能提升实践能力,为应用型人才的培养提供坚实基础。In order to support the construction of microelectronic technology experiment course,Silvaco TCAD semiconductor and device simulation software is adopted,which can enhance students'intuitive understanding of oxidation,doping,ion implantation,lithography and other processes in microelectronic process,and build a systematic simulation example from grid construction,process simulation,PN junction analysis to the whole process design of NMOS devices.By doing so,students can be familiar with the basic structure,carrier parameters and other properties of semiconductor devices and deeply understand the process of microelectronic devices.The intuitive graphic display of software simulation can not only deepen students'understanding of curriculum knowledge,but also improve their practical ability and provide a solid foundation for the cultivation of applied talents.

关 键 词：微电子工艺 集成电路 实验课程建设 Silvaco TCAD 

分 类 号：G420[文化科学—课程与教学论]