压电驱动喷射点胶阀系统性能的仿真与实验  

Simulation and experiment of system performance of piezostack-driven jetting dispenser

作　　者：邓珺珺 邓圭玲[1,2] 彭雯[3] 周灿 李广[1,2] DENG Junjun;DENG Guiling;PENG Wen;ZHOU Can;LI Guang(School of Mechanical and Electrical Engineering,Central South University,Changsha 410083,China;State Key Laboratory of High Performance Complex Manufacturing,Central South University,Changsha 410083,China;College of Electrical Engineering,Hunan Industry Polytechnic,Changsha 410205,China)

机构地区：[1]中南大学机电工程学院,湖南长沙410083 [2]中南大学高性能复杂制造国家重点实验室,湖南长沙410083 [3]湖南工业职业技术学院电气工程学院,湖南长沙410205

出　　处：《传感器与微系统》2023年第1期46-49,54,共5页Transducer and Microsystem Technologies

基　　金：国家自然科学基金青年科学基金资助项目(51705538)。

摘　　要：压电喷射阀因其高频、胶滴均匀以及可实现纳升量级的微量胶滴喷射,而被广泛应用于微电子封装。建立了压电喷射阀的机械系统动力学自动分析(ADAMS)仿真模型,基于模型定义流体动力学模型中喷针的运动,实验验证了仿真模型的合理性。通过实验和仿真,研究了喷射阀的动态性能和胶滴喷射的动态过程,分析了胶液填充速度对胶滴体积的影响规律。实验探究了不同行程下喷射阀的喷射性能,胶滴体积的一致性误差不超过±6%,绝对误差随行程增大而增大,当行程为0.06 mm时,相对误差不超过±3%。Piezoelectric jetting dispenser is widely used in microelectronic packaging because of its high frequency,uniform droplet and the ability to spray nanoliter droplet.The automatic dynamic analysis of mechanical system(ADAMS)simulation model of the dispenser is established.Based on the model,the movement process of the needle in the hydrodynamic model is defined.The experimental results verify the rationality of the simulation model.Through experiment and simulation,the dynamic performance of the dispenser and the dynamic process of droplet formation are studied,and the influence of the filling speed on droplet volume is analyzed.The spray performance of the dispenser under different stroke is investigated experimentally.The consistency error of the dot volume is not more than±6%,the absolute error increases with the stroke,the relative error is not more than±3%at 0.06 mm stroke.

关 键 词：微电子封装 点胶技术 压电驱动 机械系统动力学自动分析 流体仿真 

分 类 号：TN403[电子电信—微电子学与固体电子学]