微纳米线距标准样片的研制与应用  

Development and Application of Micro-Nano Meter Pitch Standard Sample

作　　者：赵琳[1] 张晓东 韩志国[1] 李锁印[1] 许晓青[1] 冯亚南[1] 吴爱华[1] ZHAO Lin;ZHANG Xiaodong;HAN Zhiguo;LI Suoyin;XU Xiaoqing;FENG Yanan;WU Aihua(The 13th Institute of CETC,Shijiazhuang Hebei 050051,China)

机构地区：[1]中国电子科技集团公司第十三研究所计量维修部,河北石家庄050051

出　　处：《传感技术学报》2022年第11期1451-1457,共7页Chinese Journal of Sensors and Actuators

摘　　要：为了精确控制线宽尺寸参数,研制了一套周期尺寸为100 nm~10μm的线距标准样片。首先,依据样片的应用进行了图形设计,分别采用电子束直写和投影光刻技术开发出线距标准样片,并对制备出的样片进行考核,考核参数包括线距尺寸、均匀性、稳定性。并与VLSI同等量值样片的质量参数进行了对比,以周期尺寸为100 nm的样片为例进行表征,研制的样片均匀性为1.8 nm,稳定性为0.6 nm,VLSI样片的均匀性为1.5 nm;并使用CD-SEM对样片进行了定值,整体不确定度为3.9 nm~23 nm(k=2)。研制的线距样片不仅包括光栅结构,还包括格栅结构,可以对不同的测试设备进行现场校准。As an important part of traceability chain for micro-nano geometric quantity,micro-nano pitch standard template is the basic guarantee for the development of micro-nano technology.By discussing the micro-nano pitch template as the standard substance,the important effect of contrast、uniformity and stability assessment in the quality parameter evaluation of standard template is pointed out.By using SEM as the evaluation instrument,the contrast of templates of different materials are measured;By using CD-SEM as the evaluation instrument,the uniformity,stability experiments and uncertainty in measurement of templates with different nominal pitch and different manufacturer are carried out.Through the experiment and analysis of the quality parameter evaluation,it provides an important theoretical basis for the production and use of micro-nano pitch standard template.The experimental results show that the evaluation of quality parameters plays an important role in the use of micro-nano pitch template as standard substance.

关 键 词：微纳米 线距样片 研制 CD-SEM 均匀性 稳定性 校准 

分 类 号：TB921[一般工业技术—计量学]