惯性导航微系统三维集成研究进展  

A review on 3D integration of inertial navigation microsystem

作　　者：王楷 孔延梅[2] 蒋鹏 杜向斌 叶雨欣[2] 鞠莉娜 曹志勇[1] 刘瑞文[2] 焦斌斌[2] WANG Kai;KONG Yanmei;JIANG Peng;DU Xiangbin;YE Yuxin;JU Lina;CAO Zhiyong;LIU Ruiwen;JIAO Binbin(School of Materials Science and Engineering,Hubei University,Wuhan 430062,China;Microsystem Technology Laboratory,New Technology Development Department,Institute of Microelectronics,Chinese Academy of Sciences,Beijing 100029,China;East China Institute of Optoelectronic Integrated Devices,Suzhou 215163,China)

机构地区：[1]湖北大学材料科学与工程学院,湖北武汉430062 [2]中国科学院微电子研究所新技术开发部微系统技术实验室,北京100029 [3]华东光电集成器件研究所,江苏苏州215163

出　　处：《微电子学与计算机》2023年第1期18-30,共13页Microelectronics & Computer

摘　　要：随着“摩尔定律”日趋放缓,微系统封装集成技术成为“超越摩尔”最有前景的技术之一.惯性微系统技术是在微机电系统(MEMS)基础上,将多种传感器通过异质异构集成技术,在硅基片上进行3D集成,开发出具有多种功能的芯片级的微小型电子系统,实现更高的集成度和更小的体积,并内置算法,实现芯片级导航、定位等功能.该系统通过自身传感器采集到的数据信息进行自主导航,不受外界环境影响,具有很强的抗干扰能力,呈现出小型化、智能化趋势.本文主要探讨了惯性微系统的组成部分以及MEMS惯性传感器的常见分类.通过对国内外研究现状的梳理,重点分析了以第三代集成技术为主的惯性微系统集成的特点和研究进展.文章最后探讨了惯性微系统未来的研究方向和发展趋势.With Moore's Law slowing down,microsystem packaging and integration technology has become one of the most promising technologies to u surpass Moorew.Inertial microsystem technology is based on micro-electro-mechanical system(MEMS),which integrates a variety of sensors on silicon substrate through heterogeneous integration technology,and develops microelectronic systems with various functions at chip level.Inertial microsystem technology has higher integration and smaller size.It can achieve chip-level navigation,positioning and other functions through built-in algorithms.The system navigates autonomously through the data collected by its own sensors to avoid being affected by the external environment.Therefore,it has a strong anti-interference ability,showing a trend of miniaturization and intelligence.In this paper,the components of inertial microsystems and the common classification of MEMS inertial sensors are discussed.By sorting out the current situation of domestic and foreign research,the characteristics and research progress of inertial microsystem integration,which are mainly focusing on the third generation integration technology are analyzed.Finally,the future research direction and development trend of inertial microsystems are discussed.

关 键 词：MEMS 惯性器件 微系统 异质 定位导航 三维集成 

分 类 号：TN42[电子电信—微电子学与固体电子学]