MEMS电容式加速度计的四拱梁悬挂设计与参数优化  

DESIGN AND PARAMETER OPTIMIZATION OF 4-ARCHED-BEAM SUPPORT OF A MEMS CAPACITIVE ACCELEROMETER

作　　者：张猛 施展 张华杰 赵梦石 郭一凡 宦荣华[1,2] ZHANG Meng;SHI Zhan;ZHANG Huajie;ZHAO Mengshi;GUO Yifan;HUAN Ronghua(Institution of Applied Mechanics,Zhejiang University,Hangzhou 310027,China;Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province,Hangzhou 310027,China;Jiaxing Power Supply Company,State Grid Zhejiang Electric Power Co.,LTD.,Jiaxing 314000,Zhejiang,China)

机构地区：[1]浙江大学应用力学研究所,杭州310027 [2]浙江省软体机器人与智能器件重点实验室,杭州310027 [3]国网浙江省电力有限公司嘉兴供电公司,浙江嘉兴314000

出　　处：《力学与实践》2022年第6期1351-1356,共6页Mechanics in Engineering

基　　金：国家电网科技项目资助(SGZJJXI0SYJS2101112)。

摘　　要：微机械结构的设计是MEMS电容式加速度计研究的重要内容。本文设计了一款四拱梁悬挂的MEMS电容式加速度计结构,建立了四拱梁悬挂结构的力学模型,对拱梁的结构参数进行了优化分析并获得了最优悬挂参数,接着利用COMSOL软件对微机械结构的自振特性进行了分析,并研究了静电对微结构自振频率的影响。研究表明,设计的四拱梁加速度计具有结构稳定、敏感方向位移灵敏度好、自振频率可调等特点,可为高性能的MEMS电容式加速度计的研制提供理论参考。The design of micromechanical structure is an important part of a MEMS capacitive accelerometer.In this paper,a MEMS capacitive accelerometer structure suspended by 4-arched-beams is designed.The mathematical model of the 4-arched-beam suspension is established,from which the structural parameters of suspension of the arched-beam are studied,and the optimal suspension parameters are obtained.Then,the natural vibration characteristics of the micro mechanical structure are analyzed by COMSOL software,and the influence of static electricity on the vibration frequency of the micro structure is studied.Results show that the designed MEMS accelerometer has the advantages of structural stability,high sensitivity in sensitive direction and tunable vibration frequency,etc.,which provides theoretical reference for the manufacture of MEMS accelerometer with high performance.

关 键 词：微结构 微机电系统 动力学 电容式加速度计 

分 类 号：O39[理学—工程力学]