“集成电路工艺”虚拟实践平台建设与教学实践  

Construction and teaching practice of virtual practice platform for CMOS processing technology

作　　者：汪家奇[1] 刘勐[1] 申人升[1] 梁红伟[1] WANG Jiaqi;LIU Meng;SHEN Rensheng;LIANG Hongwei(School of Microelectronics,Dalian University of Technology,Dalian 116023,China)

机构地区：[1]大连理工大学微电子学院,辽宁大连116023

出　　处：《实验室科学》2023年第1期111-114,共4页Laboratory Science

基　　金：2019年教育部产学合作协同育人项目(第二批)(项目编号:201902044014)。

摘　　要：在集成电路(IC)工艺的实验教学中,互补金属氧化物半导体(CMOS)集成电路加工工艺实验教学是学生加深对半导体工艺理解的重要环节。由于微电子行业的实验场所、时间以及实验设备的各种限制,真正的实际操作非常有限,导致实验教学效果并不理想。基于这些原因,开发了“集成电路工艺”虚拟实践平台,该平台对传统的实际操作实验教学进行了虚拟仿真,通过该平台学生可以进行集成电路工艺的模拟操作,极大地促进了学生的实验兴趣,并能够加深对集成电路制造工艺的理解。该虚拟实践平台已在学生中使用,取得了良好的实验教学效果。虚拟实践平台可以通过互联网进行优质教学资源共享,对微电子专业学生的实验教学具有良好的促进作用。In the experiment teaching of IC manufacturing processing technology,Complementary Metal Oxide Semiconductor(CMOS)IC processing technology experiment teaching is a key learning link for students to deepen their understanding of IC manufacturing process.Due to the limitations of experimental location,time and experimental equipment,the actual experimental operation is very limited,which results in the unsatisfactory experiment teaching result.Based on these reasons,the virtual practice platform of"Integrated Circuit manufacturing process"is developed and designed.The platform carries out virtual simulation for the traditional practical operation experiment.Through the virtual practice platform,students can carry out the simulation operation of IC manufacturing process,which greatly promotes students’experimental interest and deepens their understanding of IC manufacturing process.The virtual practice platform has been used by students and the good experiment teaching effect has been achieved.The virtual practice platform can share high-quality resources through the internet,which has a good effect in promoting the experiment teaching of microelectronics majors.

关 键 词：互补金属氧化物半导体 集成电路制造工艺 虚拟实践平台 实验教学 

分 类 号：TN47[电子电信—微电子学与固体电子学]