马来酰亚胺-丙烯酸酯共聚物的制备及在热纳米压印抗蚀剂的应用  

Synthesis of Maleimide-Acrylate Copolymer and Its Usage as Thermal Nanoimprint Lithography Resist

作　　者：韦南君 赵晶 蔡雅娟 杨旭 刘洋[1] 孙义兴 李一博 杨子昊 吴雅各 岳婷 盖景刚[1] Nanjun Wei;Jing Zhao;Yajuan Cai;Xu Yang;Yang Liu;Yixing Sun;Yibo Li;Zihao Yang;Yage Wu;Ting Yue;Jinggang Gai(Polymer Research Institute of Sichuan University,State Key Laboratory of Polymer Materials Engineering,Chengdu 610065,China;PetroChina Liaoyang Petrochemical Company,Liaoyang 111000,China;Sichuan Guojian Inspection Co.,Ltd,Luzhou 646099,China)

机构地区：[1]四川大学高分子研究所高分子材料工程国家重点实验室,四川成都610065 [2]中国石油辽阳石化分公司,辽宁辽阳111000 [3]四川国检检测有限责任公司,四川泸州646099

出　　处：《高分子材料科学与工程》2023年第6期125-130,共6页Polymer Materials Science & Engineering

基　　金：国家自然科学基金资助项目(51473097,51003067);四川省科技计划(2019YJ0107);高分子材料工程国家重点实验室自主课题(sklpme2022-2-02)。

摘　　要：马来酰亚胺与丙烯酸酯通过自由基溶液聚合制备了马来酰亚胺-丙烯酸酯共聚物(P(AA-MI-AHA))。根据凝胶渗透色谱,共聚物的多分散系数低于2,表现出窄的分子量分布特点;根据热失重分析和差示扫描量热分析,聚合物热分解温度高于140℃,玻璃化温度约为128℃,展现出较好的热稳定性。将共聚物用作热纳米压印抗蚀剂材料,研究了共聚物的微纳米图案复制能力。扫描电子显微镜观察到排列规整的条纹图案,分辨率约为100 nm。综上表明,所得马来酰亚胺-丙烯酸酯共聚物用作热纳米压印抗蚀剂材料展现出较好的图像复制能力。The copolymer P(AA-MI-AHA)was prepared by free radical solution polymerization with maleimide and acrylate.According to gel permeation chromatography,the polydispersity index of copolymer is lower than 2,showing narrow molecular weight distribution.According to thermogravimetric analysis and differential scanning calorimeter,the thermal decomposition temperature is higher than 140℃ and glass transition temperature is about 128℃,exhibiting good thermal stability.These copolymers were used as thermal NIL resists to study the micro-nano pattern replication ability.The distinct patterns with the resolution of 100 nm are observed by scanning electron microscope,the results show that the prepared maleimide-acrylate copolymers used as thermal NIL resist materials demonstrate a good image reproduction ability.

关 键 词：丙烯酸酯 马来酰亚胺 纳米压印 抗蚀剂 分辨率 

分 类 号：TQ317[化学工程—高聚物工业]