晶圆传输机械手的实现途径及其结构设计  

Realization Approach and Structural Design of Wafer Transfer Manipulator

作　　者：杨树文[1] 李霖[1] 于朋扬 李峥 YANG Shuwen;LI Lin;YU Pengyang;LI Zheng(The 45th Research Institute of CETC,Beijing 100176,China)

机构地区：[1]中国电子科技集团公司第四十五研究所,北京100176

出　　处：《电子工业专用设备》2023年第5期74-80,共7页Equipment for Electronic Products Manufacturing

摘　　要：晶圆传输是集成电路制造设备的组成部分之一;研究晶圆传输核心部件机械手的实现途径和国内外的技术状况,分析晶圆传输机械手的更新和迭代,探讨传输精度和效率的优化措施。通过对应用技术和需求分析,对其机械结构和末端执行器进行逆向设计并对其性能进行测试,把设计固化为可以应用的技术成果;同时提出了晶圆传输机械手的优化方向,为后期技术升级和产业化提供了理论依据,其研究结果对同类设计具有借鉴意义。Wafer transmission system is one of the subsystems of IC manufacturing equipment;Research the realization way of the core component of the wafer transfer system manipulator and the technical status of the wafer transfer manipulator at home and abroad,analyze the update and iteration of the wafer transfer manipulator of the king type of manufacturing equipment,and discuss the optimization measures of the transmission accuracy and efficiency of the wafer transfer manipulator.By means of application technology analysis and demand analysis,the reverse design of the mechanical structure and end-actuator of the wafer transfer manipulator is realized,and its performance is tested,and the design is solidified into applicable technical achievements.At the same time,the optimization of the quality of the wafer transfer manipulator is proposed.The direction provides a theoretical basis for the later technology upgrade and industrialization,and the research results have reference significance for similar design.

关 键 词：半导体制造工艺与设备 结构设计 逆向设计 机械手 末端执行器 晶圆传输 

分 类 号：TH132.3[机械工程—机械制造及自动化]