微器件操作末端执行器研究现状  

Research Status of End Effectors for Microdevice Manipulation

作　　者：宋龙刚 李晨 董亮 韩佩瑛 Song Longgang;Li Chen;Dong Liang;Han Peiying(College of Mechanical&Electrical Engineering,Shaanxi University of Science&Technology,Xi'an 710021,China)

机构地区：[1]陕西科技大学机电工程学院,西安710021

出　　处：《微纳电子技术》2023年第10期1537-1550,共14页Micronanoelectronic Technology

基　　金：国家自然科学基金面上项目(52175540);国家自然科学基金青年项目(61705124);中国博士后基金面上项目(2020M673382);陕西省教育厅服务地方专项(20JC009)。

摘　　要：微纳制造技术和微机电系统(MEMS)的迅猛发展,推动了微器件向微型化、集成化、多功能化方向发展。微器件操作末端执行器是微操作工具与微器件直接作用的部件,具有重要研究意义。综述了微器件操作末端执行器的研究现状和成果;对国内外微器件操作末端执行器进行了汇总和分类;对微器件操作末端执行器的工作原理和结构进行了介绍;基于对接触式和非接触式末端执行器研究现状的总结,分析了各种末端执行器的优势和局限。最后,讨论了微器件操作末端执行器的应用现状和面临的挑战,并对末端执行器的发展进行了展望。该研究为微器件操作末端执行器的选取和开发提供了技术参考。The rapid development of micro-nano manufacturing technology and microelectromechanical system(MEMS)has promoted the development of microdevices to the directions of miniaturization,integration and multi-function.The end effector for microdevice manipulation is a component that directly interacts with microoperation tools and microdevices,and it has important research significance.The research status and achievements of end effectors for microdevice manipulation are reviewed.The end effectors for microdevice manipulation at home and abroad are summarized and classified.The working principle and structure of end effectors for microdevice manipulation are introduced.Based on the summary of the research status of contact and non-contact end effectors,the advantages and limitations of various end effectors are analyzed.Finally,the application status and challenges of end effectors for microdevice manipulation are discussed,and the development of end effectors is prospected.The study provides a technical reference for the selection and development of end effectors for microdevice manipulation.

关 键 词：微机电系统(MEMS) 微纳制造技术 微器件 微操作 末端执行器 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]