基于虚实结合的半导体制造工艺实验教学平台应用  

Application of Physical-Virtual Experimental Teaching Platform for Semiconductor Manufacturing Process

作　　者：商世广 刘有耀 金蕾 刘维红 苗瑞霞 SHANG Shiguang;LIU Youyao;JIN Lei;LIU Weihong;MIAO Ruixia(School of Electronic Engineering,Xi'an University of Posts and Telecommunications,Shaanxi 710121,China)

机构地区：[1]西安邮电大学电子工程学院,陕西710121

出　　处：《集成电路应用》2024年第1期68-71,共4页Application of IC

摘　　要：阐述虚实结合的实验教学平台设计,将先进材料、半导体工艺、器件仿真工具引入实践教学中,包括课程内容、实验室建设和运行管理。构建一个虚实相结合、课内课外相结合和教学科研相结合的半导体制造工艺实践教学体系。This paper describes the design of an experimental teaching platform that combines virtual and real elements,introducing advanced materials,semiconductor processes,and device simulation tools into practical teaching,including course content,laboratory construction,and operation management.It explores the construction of a semiconductor manufacturing process practical teaching system that combines virtual and real,in class and out of class,and teaching and research.

关 键 词：实验教学平台 半导体制造工艺 虚实结合 实践教学 

分 类 号：TN305-4[电子电信—物理电子学]