平行缝焊微电子器件的光学检漏  

Optical Leakage Detection of Parallel Seam Welded Microelectronic Devices

作　　者：张泽丰 徐达[1] 谭亮 魏少伟 马紫成 Zhang Zefeng;Xu Da;Tan Liang;Wei Shaowei;Ma Zicheng(The 13^(th)Research Institute,CETC,Shijiazhuang 050051,China;Shenyang Aerospace Xinle Co.,Ltd.,Shenyang 110034,China)

机构地区：[1]中国电子科技集团公司第十三研究所,石家庄050051 [2]沈阳航天新乐有限责任公司,沈阳110034

出　　处：《半导体技术》2024年第3期285-291,共7页Semiconductor Technology

摘　　要：光学检漏为非接触式封装漏率测量方法,且单次测试可同时完成粗检及细检,是一种快速的封装检漏技术。对光学检漏与氦质谱检漏的漏率计算公式进行了详细分析和对比。设计了多组实验探究如工装翘曲度、封装内空腔体积等因素对光学检漏检测结果的影响,分析了光学检漏的“充压”问题并给出解决方案,对比了光学检漏与氦质谱检漏的检测漏率。分析了光学检漏技术的优缺点,并通过实验验证了光学检漏的可行性及可靠性,为微电子器件的光学检漏应用提供参考。Optical leakage detection is a non-contact package leakage rate measurement method,and rough inspection and fine inspection can be completed by a single test at the same time,which is a fast package leakage detection technology.The formulas for calculating leakage rate of optical leakage detection and helium mass spectrometry leakage detection were analyzed in detail and compared.Several sets of experiments were designed to explore the influences of factors such as fixture warping degree and package cavity volume on the detection results of optical leakage detection.The"pressure-charging"problem of optical leakage detection was analyzed and solutions were given,and the detection leakage rates of optical leakage detection and helium mass spectrometry leakage detection were compared.The advantages and disadvantages of optical leakage detection technology were analyzed,and the feasibility and reliability of optical leakage detection were verified by experiments,providing reference for the application of optical leakage detection in microelectronic devices.

关 键 词：微电子器件 光学检漏 平行缝焊 密封 氦质谱检漏 

分 类 号：TN407[电子电信—微电子学与固体电子学]