基于激光干涉仪同步测量的动态校准装置  

Dynamic Calibration Device Based on Synchronous Measurement of Laser Interferometer

作　　者：任瑜[1] 胡晓磊 郭志敏[1] 傅云霞[1] 张丰[1] REN Yu;HU Xiaolei;GUO Zhimin;FU Yunxia;ZHANG Feng(Shanghai Institute of Measurement and Testing Technology,Shanghai 201203,China)

机构地区：[1]上海市计量测试技术研究院,上海201203

出　　处：《计量学报》2024年第3期349-355,共7页Acta Metrologica Sinica

基　　金：上海市市场监督管理局科研项目(2021-04)。

摘　　要：为满足时变几何量的瞬时动态测试需求,研制了一种基于激光干涉仪同步测量的动态校准装置。该装置采用直线运动导轨和运动发生器、长度标准器激光干涉仪,以基于GNSS驯服时钟的同步触发器实现同步测量并确保时间准确稳定,并使用动态校准软件实现控制一体化。经综合分析激光干涉仪的最大允许误差、直线运动导轨的直线度、环境因素、触发信号间时延及激光干涉仪测量时延等因素,该装置的长度示值的测量不确定度为Q[1.8μm,3×10^(-7)L](k=2)。与同型号激光干涉仪的比对实验和激光跟踪仪瞬时长度测试实验,证明了不确定度评定的合理性以及该装置在瞬时动态准确度测试中的可行性。To realize the instantaneous dynamic test of time-varying geometry,a dynamic calibration device based on synchronous measurement of laser interferometer was developed.The device used linear motion rail as motion generator,laser interferometer as length standard,synchronous trigger based on GNSS tame clock to measure synchronously and ensure accurate and stable time,and dynamic calibration software to achieve control integration.By comprehensively analyzing the factors such as length measurement and time delay,the measurement uncertainty of the length indication of the device was Q[1.8 μm,3×10^(-7)L](k=2).Two experiments proved the rationality of uncertainty evaluation and the feasibility of the device in the instantaneous dynamic accuracy test of laser tracker.

关 键 词：几何量计量 动态校准 激光干涉仪 同步测量 大尺寸测量 时变几何量 

分 类 号：TB921[一般工业技术—计量学]