低g值MEMS惯性开关研究进展  

Research progress of low-g MEMS inertial switch

作　　者：熊壮[1] 张凤田[1] 谢晋 张照云[1] 杨杰[1] 赵宝林[1] XIONG Zhuang;ZHANG Fengtian;XIE Jin;ZHANG Zhaoyun;YANG Jie;ZHAO Baolin(Institute of Electronic Engineering,China Academy of Engineering Physics,Mianyang Sichuan 621999,China)

机构地区：[1]中国工程物理研究院电子工程研究所,四川绵阳621999

出　　处：《太赫兹科学与电子信息学报》2024年第8期908-917,共10页Journal of Terahertz Science and Electronic Information Technology

基　　金：某专项基金资助项目(7090104050101)。

摘　　要：微机电系统(MEMS)惯性开关是集传感与执行为一体的无源电子器件,具有体积小、重量轻、易集成、加工一致性好、免装配等优势,在汽车工业、航空航天、武器装备等领域具有广阔的应用前景。低g值MEMS惯性开关的应用场景主要为飞行器加/减速过程特定功能的触发,在设计时应保证弹簧刚度低,质量块体积大,在结构设计与加工工艺中存在一定难度。本文介绍了低g值MEMS惯性开关的基本物理模型和工作原理,对国内外研究现状进行了阐述,总结了现阶段迫切需要解决的关键问题,并提出相应解决思路,为后续研究提供有益参考。Micro-Electro-Mechanical Systems(MEMS)inertial switches are passive electronic devices that integrate sensing and actuation.They have the advantages of small size,light weight,easy integration,good processing consistency,and no need for assembly.They have a broad application prospect in fields such as the automotive industry,aerospace,and military equipment.The application scenarios of low-g value MEMS inertial switches are mainly for triggering specific functions during the acceleration/deceleration process of aircraft.In the design,it is necessary to ensure low spring stiffness and a large mass block volume,which poses certain difficulties in structural design and processing technology.This paper introduces the basic physical model and working principle of low-g value MEMS inertial switches,discusses the current research status at home and abroad,summarizes the key issues that urgently need to be addressed at this stage,and proposes corresponding solutions,providing beneficial references for subsequent research.

关 键 词：微机电系统 惯性开关 低g值 微纳加工 

分 类 号：TN305[电子电信—物理电子学]