基于平面肖特基二极管的220GHz~330GHz分谐波混频器  

A 220GHz~330GHz sub-harmonic mixer based on planar Schottky diode

作　　者：纪东峰 代鲲鹏 王维波[1] 李俊锋 余旭明[1] JI Dongfeng;DAI Kunpeng;WANG Weibo;Li Junfeng;YU Xuming(Nanjing Electronic Devices Institute,Nanjing 210016,China)

机构地区：[1]南京电子器件研究所,南京210016

出　　处：《空间电子技术》2024年第4期71-76,共6页Space Electronic Technology

基　　金：科技部研发项目(编号:No.23YFB3207801)。

摘　　要：为了满足太赫兹仪器仪表、被动成像、高速通信等系统对宽带谐波混频器的需求,基于平面肖特基二极管在25um厚的GaAs基片上研制了工作频率可覆盖标准矩形波导WR-3.4主模工作频段(220GHz~330GHz)的太赫兹宽带分谐波混频器。文章对二极管结构进行了改进,采用“T栅”结构实现了低寄生阳极结,改善了肖特基二极管寄生特性,提升了二极管性能。利用单片集成技术实现了二极管与无源电路的微米级对准,保证了宽带分谐波混频器的实现精度。实测结果显示,分谐波混频器在220GHz~330GHz范围内单边带变频损耗小于12dB,中频工作带宽可达35GHz(变频损耗小于12dB),1dB压缩点在-4dBm附近。文章同时进行了多个分谐波混频器样品测试,测试结果的一致性验证了该技术方案工程化应用的潜力。To meet the requirements of broadband harmonic mixers for terahertz instruments,passive imaging,high-speed communication systems,and other systems,a terahertz broadband subharmonic mixer with a working frequency covering dominant mode(220GHz~330GHz)of the standard rectangular waveguide WR-3.4 was developed using the planar Schottky diode.The subharmonic mixer circuit used a 25um thick gallium arsenide(GaAs)as the supporting substrate.In this paper,the structure of the Schottky diode has been improved by using“T-shaped”structure to achieve a low parasitic anode junction,which can reduce the parasitic characteristics of the Schottky diodes,and improve the frequency performance.The monolithic integration technology was used to achieve a micrometer level alignment between the Schottky diode and the passive circuit,ensuring the implementation of broadband subharmonic mixers.Experimental results show that the single sideband(SSB)conversion loss of the 220GHz~330GHz sub-harmonic mixer is less than 12dB in the range of 220GHz~330GHz,the intermediate frequency working bandwidth is up to 35GHz(the SSB conversion loss is less than 12dB),and the compression point of 1dB is about-4dBm.In addition,the consistency of test results from multiple sub-harmonic mixer samples confirms the potential for engineering application.

关 键 词：太赫兹 分谐波混频器 宽带 单片集成技术 肖特基二极管 

分 类 号：TN323[电子电信—物理电子学] TN385[航空宇航科学与技术—飞行器设计] V443