MEMS电容薄膜真空计微电容检测系统的设计  

Design of Micro Capacitance Measurement System for MEMS Capacitance Diaphragm Gauges

作　　者：高青松[1] 郭朝帽 陶院[1] 杨雷 马动涛[1] 张虎忠[1] GAO Qingsong;GUO Chaomao;TAO Yuan;YANG Lei;MA Dongtao;ZHANG Huzhong(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2024年第6期603-609,共7页Vacuum and Cryogenics

基　　金：国家自然科学基金重大科研仪器研制项目(61627805)。

摘　　要：为了满足空间环境探测对真空测量仪器准确度高、体积小、质量轻、功耗低的应用需求,基于微机电系统(MEMS)的小型化电容薄膜真空计应运而生。针对MEMS电容薄膜真空计微小电容测量需求,设计了一种基于CDC电容数字转换器的微电容检测系统,获得了fF级微电容检测分辨率。采用温度漂移误差自校准技术,解决了测量压力受温度扰动影响的问题。地面样机测试与验证表明,该检测系统具有宽量程、高分辨率和低功耗检测的优点,为MEMS电容薄膜真空计实现空间应用奠定了技术基础。In order to satisfy the application requirements of high accuracy,small size,light weight and low power consumption for vacuum measurement instruments in space detection tasks,miniature capacitance diaphragm gauge(CDG)based on MEMS technology comes into being.For the MEMS CDG developed by our team,a micro capacitance measurement system based on CDC capacitor digitizer was designed and fabricated,and it can distinguish capacitance variations of fFlevel.The temperature drift error self-calibration technology was adopted to solve the temperature disturbance problem.The testing and verification results of the prototype show that it has the advantages of wide range,high resolution and low power consumption,providing foundation for the application of MEMS CDGs in space detection.

关 键 词：MEMS 电容薄膜 真空计 微弱电容 电子测量 

分 类 号：TB771[一般工业技术—真空技术]