不同工艺参数对生物微流控芯片结构合成的影响  

Effect of Different Process Parameters on the Synthesis of Microfluidic Biochips

作　　者：张颖 刘盛意 ZHANG Ying;LIU Shengyi(School of Intelligence and Electronic Engineering,Dalian Neusoft University of Information,Dalian,Liaoning Province 116026,China)

机构地区：[1]大连东软信息学院微电子工程系,辽宁大连116026

出　　处：《现代应用物理》2024年第5期134-139,149,共7页Modern Applied Physics

基　　金：国家自然科学基金资助项目(12027811)。

摘　　要：本文研究了纳米压印光刻技术在微流控生物芯片制造中替代传统光学光刻技术的可行性。首先探究了V50,V60和V703种不同压印胶胶型及不同转速对压印生物芯片结构的影响,最终选择了浓度较高的V70压印胶在转速为3000 r:·min^(-1)条件下进行旋涂。在电感耦合等离子体刻蚀(inductively coupled plasma,ICP)工艺参数方面,保持其他变量不变,研究了不同刻蚀时间对制备生物芯片结构的影响,最终选择刻蚀时间为900 s。研究结果表明上述条件下所制备的生物芯片微结构具备透光性良好、残余层薄和转移精度高的优点。该方法的工艺简单,具有良好的操作性和可重复性,为生物微流控芯片的制备提供了一种有效且高效的解决方案。同时优化了纳米压印和ICP刻蚀的工艺参数。实现了制备微流控生物芯片时所需的纳米压印设备和刻蚀设备所需的关键参数,为未来微流控芯片的开发和优化提供了实验数据和参考依据。To investigate the feasibility of replacing traditional photolithography with nanoimprint lithography(NIL)technology in the manufacturing of microfluidic biochips,a detailed observation and analysis of the surface structure,cross-sectional structure,and residual layer thickness of the chip are conducted.Firstly,through study on the effects of V50,V60,and V70,and different rotational speeds on the structure of the embossed biochip,the V70 is selected for spin-coating at a rotational speed of 3000 r:·min^(-1).With regard to the process parameters of inductively coupled plasma(ICP),the effects of different etching times on the structure of the prepared biochips are investigated,when other variables are constant.900 s etching time is selected for etching preparation of microfluidic biochips.The research results show that the synthesized microstructures exhibited excellent light transmittance,thin residual layers,and high transfer accuracy.This method is found to have a simple process,good operability,and repeatability,providing an effective and efficient solution for the fabrication of microfluidic biochips.Additionally,the process parameters of NIL and ICP etching are optimized.The key parameters required for the nanoimprint and etching equipment used in the preparation of microfluidic biochips are successfully achieved,providing experimental data and a reference for the future development and optimization of microfluidic chips.

关 键 词：纳米压印 生物芯片 ICP刻蚀 工艺参数 微流控芯片 

分 类 号：TN304[电子电信—物理电子学] O47[理学—半导体物理]