一种基于惯性致动的四足压电移动机器人研究  

Research on a Four-Legged Piezoelectric Mobile Robot Based on Inertial Actuation

作　　者：李运菲 祝锡晶[1] 李婧[1] 高国栋 LI Yunfei;ZHU Xijing;LI Jing;GAO Guodong(Shanxi Key Laboratory of Advanced Manufacturing Technology,North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学先进制造技术山西省重点实验室,山西太原030051

出　　处：《压电与声光》2024年第5期741-746,754,共7页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金(51975540);先进制造技术山西省重点实验室(中北大学)2022年度开放基金(XJZZ202202);山西省基础研究计划项目(202203021222041)。

摘　　要：设计了一种基于压电双晶梁的L型压电驱动器,基于模块化设计思想将L型压电驱动器应用于压电移动机器人的研制。压电移动机器人由4个周向分布的L型压电驱动器和连接平台组成,结构简单紧凑,可实现2自由度平面内大范围高精运动。对压电移动机器人进行加工和装配,并搭建测试平台对压电移动机器人的运动输出特性进行实验研究。测试结果表明,压电移动机器人具有兼顾高精度、快速度、高稳定性和强承载能力的良好综合性能,其运动分辨率为1μm,最大运动速度可达46 mm/s,承载能力可达75 g,在微纳操作、晶圆缺陷检测和超精密加工领域具有广阔的应用前景。In this study,based on the modular design concept,an L-type piezoelectric actuator is applied to the development of a piezoelectric mobile robot.The mobile robot is composed of four circumferentially distributed L-type piezoelectric actuators and connecting platforms.This contribution representsa simple and compact structuredesigned to achieve a significant range of high-precision motion in a 2-DOF plane.The mobile robot was processed and assembled,and a test platform was developed to investigate its motion outputcharacteristics.Experimental results demonstratedthat the proposed mobile robot showed a good comprehensive performance including high precision,speed,and stability,and strong carrying capacity.Its motion resolution,maximum motion speed,and carrying capacitywere 1μm,46 mm/s,and 75 g,respectively.Finally,the proposed mobile robot has broad application prospects in terms of micro and nano operations,wafer defect detection,and ultra-precision machining.

关 键 词：惯性致动 微型机器人 压电驱动器 模块化设计 运动特性 

分 类 号：TN384[电子电信—物理电子学] TN96