离子束表面加工设备控制系统研究与设计  

Research and Design of Control System for Ion Beam Surface Processing Equipment

作　　者：范江华 黄一峻 周立平 周波 刘庆浩 胡坤 FAN Jianghua;HUANG Yijun;ZHOU Liping;ZHOU Bo;LIU Qinghao;HU Kun(The 48^(th) Research Institute of CETC,Changsha 410111,China)

机构地区：[1]中国电子科技集团公司第四十八研究所,湖南长沙410111

出　　处：《电子工业专用设备》2024年第6期16-19,53,共5页Equipment for Electronic Products Manufacturing

摘　　要：通过研究离子束表面加工设备的功能要求和工艺流程,设计了一套具备全自动真空、控温、传片、镀膜、刻蚀等功能的控制系统,并详细阐述控制系统各模块的功能及设计实现。经过产线流片验证,该控制系统运行稳定,满足离子束加工设备镀膜与刻蚀等工艺控制需求。Based on the study of the function requirements and process flow of ion beam surface processing equipment,a control system with automatic vacuum,temperature control,film transfer,coating,etching and other functions is designed,and the function of each module of the control system is described in detail.The control system has been verified by the flow sheet of the production line,which runs stably and meets the requirements of process control such as coating and etching of ion beam processing equipment.

关 键 词：离子束溅射沉积 离子束刻蚀 离子束加工 控制系统 

分 类 号：TN305[电子电信—物理电子学]