微机电惯性测量单元的物理特性模型研究  

Construction of the Physical Characteristic Model for a Inertial Measurement Unit

作　　者：陈志勇[1] 杜兆祥 王振凯 孟凡琛 何远清[2] CHEN Zhiyong;DU Zhaoxiang;WANG Zhenkai;MENG Fanchen;HE Yuanqing(Department of Precision Instrument,Tsinghua University,Beijing 100084;Beijing Institute of Aerospace Control Devices,Beijing 100039)

机构地区：[1]清华大学精密仪器系,北京100084 [2]北京航天控制仪器研究所,北京100039

出　　处：《导航与控制》2024年第5期174-181,208,共9页Navigation and Control

基　　金：国家某专项课题(编号:20214821048)。

摘　　要：针对微机电惯性测量单元物理特性的描述问题,提出了一种惯性测量单元的数学模型构建方法。通过对惯性测量单元建立有限元分析模型,进行多物理场仿真,得到其对加速度和角加速度激励的响应特性,建立传递函数模型。通过温度实验建立温度响应模型,通过热固耦合仿真得到惯性交叉敏感性的温度依赖模型,通过标定实验和线振动、角振动实验建立惯性元件的静态敏感性和动态响应模型。对所构建的数学模型进行了测试,结果表明其能够反映惯性测量单元的内部物理状态和惯性测量误差,可用于误差分析和系统仿真。In response to the issue of describing the physical characteristics of micro-electromechanical inertial measurement units,a mathematical model construction method of IMU is proposed.By establishing a finite element analysis model of the IMU and conducting multi-physics simulations,the response characteristics to acceleration and angular acceleration excitation are obtained,and the transfer function models are established.A temperature response model is established through temperature experiments,and a temperature-dependent model of inertial cross-sensitivity is obtained through thermo-solid coupling simulations.The static sensitivity and dynamic response models of inertial components are established through calibration experiments and linear vibration/angular vibration experiments.The constructed mathematical model is tested,and the results show that it can reflect the internal physical state of the IMU and the inertial measurement errors,and can be used for error analysis and system simulation.

关 键 词：惯性测量单元 物理特性 模型 结构 多物理场 

分 类 号：V241.6[航空宇航科学与技术—飞行器设计]