变刚度单轴电容式MEMS加速度计设计  

Design of variable stiffness uniaxial capacitive MEMS accelerometer

作　　者：洪逸飞 武焕臣 汤沛源 刘晨 李磊 HONG Yifei;WU Huanchen;TANG Peiyuan;LIU Chen;LI Lei(School of Transportation and Vehicle Engineering,Shandong University of Technology,Zibo 255049,China)

机构地区：[1]山东理工大学交通与车辆工程学院,山东淄博255049

出　　处：《传感器与微系统》2025年第4期70-73,共4页Transducer and Microsystem Technologies

基　　金：山东省自然科学基金面上项目(ZR2023MA057);国家自然科学基金资助项目(11902182);山东省高校青年创新团队发展计划资助项目(2023KJ150)。

摘　　要：本文提出了一种利用静电弹簧软化效应提高加速度计灵敏度的方法。加速度计采用4组U型弹簧对敏感质量进行支撑,敏感质量上设计了差分电容检测结构和静电调谐结构。实现了结构谐振频率可调,保证了加速度计的结构强度,提高了传感器灵敏度。建立了加速度计的数学结构模型。通过仿真,对加速度计进行模态分析,研究了调谐电压对灵敏度的影响。结果表明:当调谐电压增大到30 V时,加速度计的位移灵敏度增加了34%,电容灵敏度增加了39.7%,谐振频率降低了13.4%。最后利用实验进行谐响应分析,发现加速度计的谐振频率降低了17.5%,验证了变刚度方案的可行性。A method to improve the sensitivity of accelerometer by using the softening effect of electrostatic spring is proposed.The accelerometer uses four sets of U-springs to support the sensitive mass.Differential capacitance detection structure and electrostatic tuning structure are designed for the sensitive mass,so that the structural resonance frequency can be adjustable,the structural strength of the accelerometer is ensured,and the sensitivity of the sensor is improved.The mathematical structure model of accelerometer is established.Modal analysis of the accelerometer is carried out through simulation,and the influence of the tuning voltage on the sensitivity is studied.The results show that when the tuning voltage is increased to 30 V,the displacement sensitivity of the accelerometer increases by 34%,the capacitance sensitivity is increased by 39.7%,and the resonant frequency is decreased by 13.4%.Finally,the harmonic response analysis is carried out by experiment,and it is found that the resonant frequency of the accelerometer is reduced by 17.5%,which verifies the feasibility of the variable stiffness scheme.

关 键 词：MEMS 电容式加速度计 灵敏度 变刚度 谐响应分析 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]