三自由度并联压电粘滑运动平台  

Three-degree-of-freedom parallel piezoelectric stick-slip platform

作　　者：孟令伟 杨依领 吴高华 崔玉国[1] 魏燕定[3] MENG Lingwei;YANG Yiling;WU Gaohua;CUI Yuguo;WEI Yanding(Ningbo Key Laboratory of Micro-nano Motion and Intelligent Control,Faculty of Mechanical Engineering and Mechanics,Ningbo University,Ningbo 315211,China;School of Engineering,Huzhou University,Huzhou 313000,China;Key Laboratory of Advanced Manufacturing Technology of Zhejiang Province,School of Mechanical Engineering,Zhejiang University,Hangzhou 310027,China)

机构地区：[1]宁波大学机械工程与力学学院宁波市微纳运动及智能控制重点实验室,浙江宁波315211 [2]湖州师范学院工学院,浙江湖州313000 [3]浙江大学机械工程学院浙江省先进制造技术重点实验室,浙江杭州310027

出　　处：《光学精密工程》2025年第3期427-437,共11页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.51805276,No.U23A20618);宁波市重大科技攻关项目(No.2024Z163)。

摘　　要：针对细胞穿刺、显微操作以及微装配任务中对宏行程、高精度、大负载和多自由度的性能要求,利用压电柔顺机构设计了三自由度并联粘滑驱动平台。将压电纤维片粘贴至拱形驱动机构,构成驱动单元并结合粘滑致动,实现并联平台的大范围高精度运动。柱形支撑增强了平台承载能力,万向轴承减小了移动平台的非驱动摩擦,提高整体运动性能。通过有限元法建立拱形柔顺驱动单元的静力学模型,并对输出位移和固有频率进行仿真分析。最后,搭建实验测试系统验证平台性能。实验表明,在步进模式下,压电粘滑平台沿X,Y向平动的最大单步位移可达294.7μm和304.5μm,绕Z轴转动的最大单步转角为9.96 mrad,最大垂直负载为110 N;在扫描模式下,平动和转动的位移分辨率分别为6 nm和0.28μrad。因此,所设计的并联压电粘滑平台满足精密微操作任务所需的性能要求。In addressing the performance requirements associated with macro-stroke applications,such as high precision,substantial load capacity,and multi-degree-of-freedom functionality for tasks involving cell puncture,micro-operation,and micro-assembly,a novel three-degree-of-freedom parallel stick-slip driv⁃ing platform utilizing piezoelectric compliant mechanisms was proposed.The integration of macro fiber composite with the arch driving mechanism constructed a driving unit that facilitates stick-slip actuation,enabling large-scale,high-precision motion of the parallel platform.Furthermore,the implementation of cylindrical support significantly enhanced the platform′s load capacity,while universal bearings mitigate non-driven friction,thereby improving overall motion performance.The finite element method was uti⁃lized to establish the static model of the compliant arch driving unit,followed by simulations and analysis of output displacement and natural frequency.An experimental test system was subsequently developed to validate the output performance of the platform.Experimental results indicate that the piezoelectric stickslip platform,operating in stepping mode,achieves maximum single-step translation displacements of 294.7μm and 304.5μm along the X and Y axes,respectively,as well as a maximum single-step rotation angle of 9.96 mrad around the Z axis,with a maximum vertical load capacity of 110 N.In scanning mode,the displacement resolutions for translation and rotation are recorded at 6 nm and 0.28μrad,respec⁃tively.Thus,the designed parallel piezoelectric stick-slip platform effectively satisfies the performance cri⁃teria required for precision micromanipulation tasks.

关 键 词：压电驱动 柔顺机构 粘滑运动 三自由度 

分 类 号：TN384[电子电信—物理电子学] TH703.6[机械工程—仪器科学与技术]