SOI光电子集成  

SOI (Silicon on Insulator) based integrated optoelectronics

作　　者：余金中[1] 严清峰[1] 夏金松[1] 王小龙[1] 王启明[1] 

机构地区：[1]中国科学院半导体所集成光电子国家重点实验室,北京100083

出　　处：《功能材料与器件学报》2003年第1期1-7,共7页Journal of Functional Materials and Devices

基　　金：国家自然科学基金(No.69896260;69990540);国家科技部"973"计划(No.G2000-03-66)资助项目

摘　　要：SOI(Silicon-on-Insulator)光电子集成已成为十分引人注目的研究课题,其工艺与CMOS工艺完全兼容,可以实现低成本的SOI基整片集成光电子回路。本文综述了近几年来SOI集成光电子器件的发展以及一些最新的研究进展,着重分析几种最新型光无源器件的工作原理和结构,包括SOI光波导、SOI光波导耦合器、SOI光波导开关、相位阵列波导光栅(PAWG)、基于SOI的光探测器等,并介绍了中国科学院半导体所集成光电子国家重点实验室的研究进展。SOI based integrated optoelectronics becomes more attractive subject,because its technologyis completely compatible with CMOS technology and it is possible to reduce the cost for SOI based OEIC.The progresses of SOI based integrated optoelectronic devices in recent years are reviewed in this paper,the emphasis is laid on the working principles and structures of several optical passive devices, including SOI optical waveguide, SOI optical waveguide coupler, SOI optical switch,PAWG (phase-shift arraywaveguide grating), SOI based photodetectors. The research developments in the State Key Laboratory on Integrated Optoelectronics (China) are also presented.

关 键 词：SOI 光电子集成电路 光波导 SOI光波导开关 阵列波导光栅 SOI基光探测器 

分 类 号：TN305[电子电信—物理电子学] TN304