硬质合金工具强电流直流伸展弧等离子体CVD金刚石涂层的均匀性研究  

STUDY ON THE HOMOGENEITY OF CVD DIAMOND COATINGS ON CEMENTED CARBIDE CUTLING TOOLS BY MEANS OF HIGH CURRENT EXTENDED DC ARC PLASMA EQUIPMENT

作　　者：苗晋琦[1] 宋建华[1] 赵中琴[1] 陈利民[1] 刘志凌[1] 张恒大[1] 佟玉梅[1] 唐伟忠[1] 吕反修[1] 

机构地区：[1]北京科技大学材料科学与工程学院,北京100083

出　　处：《金刚石与磨料磨具工程》2003年第2期7-10,13,共5页Diamond & Abrasives Engineering

基　　金：国家高技术研究与发展计划新材料领域"九五"重大项目 (No.863 - 71 5 -z38- 0 3)

摘　　要：采用自行研制的强电流直流伸展电弧等离子体CVD设备对真空渗硼预处理的YG6刀片进行了金刚石涂层沉积 ,并对放于有效沉积区域不同位置沉积出的金刚石涂层刀片以及刀片自身不同位置之表面涂层的形貌、厚度、质量进行了分析、研究。结果表明 :( 1)、硬质合金工具强电流直流伸展弧等离子体CVD金刚石涂层的组织、形貌、厚度、质量都是均匀一致的。 ( 2 )、利用强电流直流伸展电弧等离子体CVD设备可进行硬质合金金刚石涂层的批量沉积。High current extended DC arc plasma equipment developed by the authors was used for CVD coatings deposition on vacuum boronizing sample of cemented carbide cutting tools. Studies were made on the morphology, thickness and quality of the coatings on the cutting tools placed in different actual deposition regions, as well as those of the coatings on different part of the cutting tools. The results showed that, with the high current extended DC arc plasma equipment, homogeneous coatings can be obtained on cemented carbide cutting tools in terms of structure, morphology, thickness and quality.

关 键 词：CVD 金刚石涂层 均匀性 硬质合金工具 强电流直流伸展电弧 等离子体 

分 类 号：TG7[金属学及工艺—刀具与模具] TG174.444