离轴照明Schwarzschild投影物镜的计算机辅助装调方法  

Computer-aided alignment of Schwarzschildobjective with off-axis illumination

作　　者：林强[1] 金春水[1] 向鹏[1] 曹健林[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春130022

出　　处：《光学精密工程》2003年第2期144-150,共7页Optics and Precision Engineering

基　　金：国家自然科学基金重点项目(No.69938020);中国科学院创新基金项目

摘　　要：介绍计算机辅助装调方法在离轴照明EUVL光学系统中的应用,阐述了一种基于奇异值分解(SVD)的牛顿迭代法来求解失调量。利用该方法对敏感矩阵进行分解,从中分析得到影响不同像差的结构参数的敏感性,并筛选出补偿器,求出相应失调量的大小。在此基础上进行多次模拟装调,证明各种情况都是收敛的,可以实现精密装调的目的。The application of computer_aided alignment in Schwarzschild objective system with off_axis illumination is described and a Newton's method based on the singular value decomposition (SVD) was used to calculate the value of misalignment. With the use of SVD to decompose the sensitivity matrix, the sensitivity of the configuration was obtained for the aberration and the compensators were sekected from the configuration. The simulation alignments were carried out in this way on a large number of random misalignments and all of them were converged.

关 键 词：集成电路 EUVL 极紫外投影光刻 光学系统装调 奇异值分解 

分 类 号：TN405[电子电信—微电子学与固体电子学]