F-I类比方法及MEMS梁的等效电路宏模型  

An Equivalent Circuit Macromodel for a MEMS Beam and F-I Analogy

作　　者：戎华[1] 黄庆安[1] 李伟华[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,南京210096

出　　处：《Journal of Semiconductors》2003年第5期528-533,共6页半导体学报（英文版）

摘　　要：建立了一种基于力 -电流 ( F- I)类比、适用于梁结构机电耦合系统小信号时域及频域分析的等效电路宏模型 ,与已有的基于力 -电压 ( F- V)类比的等效电路宏模型相比 ,基于 F- I类比的等效电路宏模型的电网络与原来的机械网络具有相同的拓扑结构 ,因此 ,基于 F- I类比的等效电路宏模型能为复杂机电系统等效电路宏模型的建立带来很大的方便 .模拟结果表明该模型具有较高的精度 .An equivalent circuit macromodel for beam-structure electromechanical systems is presented with force-current (F-I) analogy.It is appropriate for small-signal time and frequency domain analysis.Compared with the existing macormodel of force-voltage (F-V) analogy,the macromodel of F-I analogy has the advantage that the topology of the electric network of a F-I analogy macromodel is similar to that of the original mechanical network.So it is very convenient to create an equivalent circuit macromedel for a complicated MEMS in F-I analogy.Simulation results show that the macromodel of F-I analogy has better accuracy.

关 键 词：F-I类比 力-电流类比 等效电路宏模型 MEMS梁 模态分析 拉格朗日方程 微机电系统 

分 类 号：TN402[电子电信—微电子学与固体电子学] TH－39[机械工程]