微制造平台混合隔振的动力学研究  

Research on dynamics of hybrid vibration isolation syste m for a micro-manufacturing platform

作　　者：张春良 梅德庆[1] 陈子辰[1] 

机构地区：[1]浙江大学现代制造工程研究所

出　　处：《浙江大学学报（工学版）》2003年第4期465-470,共6页Journal of Zhejiang University：Engineering Science

基　　金：国家自然科学基金资助项目(50075078).

摘　　要：提出了以空气弹簧作为被动隔振元件、超磁致伸缩致动器作为主动隔振元件的微制造平台双层混合隔振系统,研究了在其主动隔振致动器的三种不同安装方式下的动力学特性,分析了主动控制力与被动隔振器参数之间的关系.研究结果表明:在微制造平台双层混合隔振系统中,当主动隔振致动器仅作用于隔振对象时的隔振性能最好,当主动隔振致动器安装于隔振对象与中间质量之间时的隔振性能次之,而当主动隔振致动器安装于中间质量与基础之间时的隔振性能最差.A two-layer hybrid vibration isolation system for the micro-manufacturing platform is proposed. The system uses air springs as passive vibration isolation elements and giant magnetostrictive actuators as active vibration isolation elements. Its dynamic characteristic and the relationships between the active force of the actuator and the parameters of the passive isolator under different installation methods for the actuator were analyzed. The research results showed that the two-layer hybrid vibration isolation system of the micro-manufacturing platform had the best isolation performance when the actuator was installed on the isolation object, and had a better isolation performance when the actuator was installed between the isolation object and the middle body, and had the worst isolation performance when the actuator was installed between the middle body and the base.

关 键 词：微制造平台 混合隔振 动力学 隔振元件 空气弹簧 致动器 安装方式 隔振性能 

分 类 号：TB535.1[理学—物理] TH－39[理学—声学]