微机电系统科学与技术的现状研究  

Research on current status of science and technology for Micro Electro-Mechanical System

作　　者：黄志奇[1] 杜平安[1] 卢凉[1] 

机构地区：[1]电子科技大学机械电子工程学院,四川成都610054

出　　处：《机械设计》2003年第11期4-6,19,共4页Journal of Machine Design

基　　金：电子科技大学青年基金资助项目(YF020401)

摘　　要：概述性地介绍了微机电系统(MicroElectroMechanicalSystem———MEMS)的定义及其特点。从理论基础、技术基础和应用研究三方面阐述了MEMS的主要研究内容。简要介绍了MEMS的基本加工技术,实际应用情况以及国内外MEMS的研究发展现状。Definition and characteristics of MEMS (Micro Electro-Mechanical System) have been introduced in a summarized way. The main content of study of MEMS has been expounded from three aspects of theoretical basis, technological foundation, and research of application. The basic manufacturing technology of MEMS, actual situation of application and current status of researching development of MEMS at home and abroad have been introduced in brief.

关 键 词：微机电系统 加工技术 微传感器 细微加工 LIGA MEMS 

分 类 号：TH-39[机械工程]