MEMS系统级设计与基于多端口组件网络的建模方法  

Multi-port-element network based MEMS system level modeling methodology

作　　者：马炳和 霍鹏飞 苑伟政 

机构地区：[1]西北工学大学微/纳米系统实验室,西安710072

出　　处：《微纳电子技术》2003年第7期40-40,共1页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目 (5 0 2 0 5 0 2 2 )

摘　　要：MEMS的系统级设计对保证其整体综合性能和合理开发MEMS产品至关重要。针对MEMS的多能量域耦合、多信号混合的特点以及能量非保守等特殊要求 ,提出了基于多端口组件网络的MEMS系统级建模方法———采用多端口组件表示MEMS的功能结构部件 ,组件与组件通过端口联成网络表示整个系统 ;用统一规范化的微分代数方程表征并用硬件描述语言表述多端口组件。针对梁等具体的MEMS功能结构部件 ,采用宏建模方法确定其行为方程 ,从而得到有特定物理意义的、可供重用的组件模型。最后 。To ensure high performance of MEMS, the system level design is of great importance. Since MEMS feature coupling of multiple energy domains, analogy and digital signals mixed, and even behaviors of MEMS are probably energy nonconservative, a novel system level modeling method of MEMS using multi port element network is proposed. With this method each functional component of MEMS is modeled as a multi port element, the network composed of the multi port elements is to represent the whole system. The behavior of multi port element is described in a canonical form of DAEs (differential and algebraic equations), and coded by VHDL AMS. As an example the behavior equations of the typical MEMS functional component, spatial beam, were extracted by macromdeling approach, then its corresponding multi port element model was established. Finally, the system level model of a micro accelerometer achieved by multi port element network modeling is presented.

关 键 词：MEMS 微电子机械系统 系统级设计 多端口组件网络 系统级建模 能结构部件 宏建模 

分 类 号：TH-39[机械工程]