力电耦合MEMS器件非线性行为的模拟  

Modeling and simulation of nonlinear behavior of mechanical-electrostatic coupled MEMS devices

作　　者：孙振新[1] 黄庆安[1] 李伟华[1] 

机构地区：[1]东南大学MEMS教育部重点实验室,江苏南京210096

出　　处：《微纳电子技术》2003年第7期48-50,共3页Micronanoelectronic Technology

摘　　要：大多数MEMS器件 (如梁、膜等 )工作时本身是非线性的 ,因此很难用刚体假设的方法等效为集总参数的宏模型。模态分析法提供了一种有效的方法。本文以静电驱动两端固定梁为例 ,介绍了存在机电耦合时的公式 ,然后利用硬件描述语言VHDL AMS对其描述 ,建立相应的动态宏模型 ,给出了模拟和分析结果 ,并与利用Coventor软件分析的结果进行了比较。Most MEMS devices, such as beams, membrane and so on, are intrinsically nonlinear in operation and, therefore, can not be used by lumped macromodels under the assumption of rigid bodies. Modal analysis provides an effective method. In this paper, we examine the elctrostatic actuated fixed fixed beam and develop the formulation including coupling of electrostatic and mechanic, then create the macromodel using VHDL AMS. The results of simulation are presented and compared with that of CoventWare FEM solver.

关 键 词：MEMS器件 微电子机械系统 非线性行为 力电耦合 VHDL-AMS 动态宏模型 模态分析法 

分 类 号：TH-39[机械工程]