硅尖的制备  

The fabrication technology of silicon tip

作　　者：王艳华[1] 孙道恒[1] 

机构地区：[1]厦门大学机电系,福建厦门361005

出　　处：《微纳电子技术》2003年第7期164-166,共3页Micronanoelectronic Technology

摘　　要：隧道硅尖的制备是微机械隧道传感器制作的一个重要组成部分 ,通过对ICP刻蚀和湿法各向异性刻蚀工艺制备硅尖实验的研究 。The fabrication technology of silicon tip is an important constituent of micro tunneling sensor. Through studying the process of ICP and anisotropic etching associate with bonding technology, ideal silicon tips and suitable process conditions were obtained.

关 键 词：隧道硅尖 各向异性刻蚀 微机械隧道传感器 ICP刻蚀 

分 类 号：TN304.12[电子电信—物理电子学]