MEMS气敏传感器  

MEMS gas sensors

作　　者：惠春[1] 徐爱兰[1] 徐毓龙[1] 

机构地区：[1]上海交通大学微纳米科学技术研究院,上海200030

出　　处：《功能材料》2003年第2期133-134,139,共3页Journal of Functional Materials

基　　金：国家"十五"重大攻关资助项目(2001BA325C)

摘　　要：随着MEMS技术的飞速发展,各种MEMS器件和系统相继问世,MEMS气敏传感器是其中之一。本文重点介绍了7种MEMS气敏传感器。Different kinds of MEMS devices and systems were born in succession along with the development of MEMS technology quickly. One of them was MEMS gas sensor. Seven types of MEMS gas sensors were introduced emphatically in this paper.

关 键 词：MEMS 气敏传感器 牺牲层技术 微电子机械系统 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]