多层金属/介质膜系中Al层的作用分析  

Role of Al layer in metallic-dielectric multiplayer

作　　者：魏军明[1] 吴永刚[1] 顾牡[1] 顾春时[1] 马晓辉[1] 王利[1] 林小燕[1] 陈玲燕[1] 

机构地区：[1]同济大学波耳固体物理研究所

出　　处：《光学精密工程》2004年第1期122-125,共4页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.10175049)

摘　　要：设计了一维金属/介质多层膜系,膜系由几个周期的高折射率(Al2O3)/低折射率(MgF2)材料所组成。在低折射率材料中插入金属层(Al),对膜系进行了优化,利用电子束蒸发方法制备了该膜系。实验表明,不仅Al层的总厚度直接影响透射谱的形状,在同样Al层总厚度情况下,Al层厚度分布对膜系也有影响。寻找到了最佳Al层分布结果,并通过了实验验证,制备出了能很好抑止BaF2晶体发射光谱的长波成分的膜系。A one dimensional metallic-dielectric multilayer coating was designed to suppress the long wavelength component in the emission spectrum of BaF_2 crystal, while the short wavelength component is allowed to pass. The coating was composed of several periods of high (Al_2O_3)/low (MgF_2) refractive index materials inserted in the metallic layer (Al). The multilayer coating was optimized and the effect of layer thickness error was estimated. The effect of thickness and distribution of the metallic layers was emphatically discussed. The multilayer coating was prepared through electron beam evaporation and the experiment results were in very good agreement with the calculated results.

关 键 词：多层膜 金属薄膜 介质薄膜 BaF2闪烁晶体 铝层 

分 类 号：O484[理学—固体物理]