微进给工作台伺服控制技术  

Control technology for high precision feed table

作　　者：蒋培军[1] 齐国生[1] 徐端颐[1] 李庆祥[1] 范晓东[1] 钱坤[1] 

机构地区：[1]清华大学精密仪器与机械学系,北京100084

出　　处：《清华大学学报（自然科学版）》2004年第5期657-660,共4页Journal of Tsinghua University(Science and Technology)

基　　金：国家"九七三"重点基础研究项目(G19990330)

摘　　要：为实现母盘刻录机中光学头的精密进给,研制了精密微进给工作台及其伺服控制系统。利用线光栅作为工作台位移检测工具,采用数字比例积分微分(PID)伺服滤波器实现位移控制。经实验方法测定,系统摩擦可以近似为Coulomb摩擦加Stribeck效应的模型。采用了基于该模型的摩擦补偿方法以消除电机死区影响。为实现精确轨迹控制,控制系统采用了零相位误差跟踪控制(ZPETC)技术。针对高增益PID、摩擦补偿和ZPETC加摩擦补偿这3种控制方法,分别进行了轨迹跟踪实验,其轨迹误差分别为±0.8、±0.6和±0.3μm。A high precision feed table and control system were developed to drive the optical head in a disc mastering device. Linear grating and a digital proportional-integral-derivative (PID) filter were used for position measurement and servo control. The measured system friction could be modelled as Coulomb friction plus the Stribeck effect. The control system compensated for the friction to eliminate the effect of electromotor dead zone. A zero-phase error-tracking controller (ZPETC) was used to reduce the phase error. Tests of three different control strategies show that high gain PID has a tracking error of ±0.8 μm, friction compensation has a tracking error of ±0.6 μm and friction compensation plus ZPETC has a tracking error of ±0.3 μm.

关 键 词：机电一体化 精密工作台 前馈控制 摩擦补偿 微进给工作台 伺服控制 母盘刻录系统 

分 类 号：TP333.4[自动化与计算机技术—计算机系统结构] TP271.4[自动化与计算机技术—计算机科学与技术]