supported by the National Natural Science Foundation of China (Grant Nos 60706030, 20827007);the National Basic Research Program of China ("973" Project)(Grant No 2007CB310504)
A micro sensor chip of High-field Asymmetric Waveform Ion Mobility Spectrometry(FAIMS) was designed and fabricated by inductively coupled plasma(ICP) etching on the both sides of silicon and double silicon-glass bondi...