Supported by the National Natural Science Foundation of China (No. 50772083);China-Japan Cooperation Program(No. 2010DFA51270);the Fundamental Research Funds for the Central Universities
The PZT thin films were prepared on (111)- Pt/Ti/SiO2/Si substrates by sol-gel method, and lead acetate [Pb(CH3COO)2], zirconium nitrate [Zr(NO3)4] were used as raw materials. The X-ray diffractometer (XRD) an...