Funded by the Natural Science Foundation of China(No.10435060 andNo. 10675095)
Ti-Si-N composite coatings were synthesized on a novel combining cathode and middle-frequency magnetron sputtering system, designed on an industrial scale. Ti was produced from the arc target and Si from magnetron tar...
supported by National Natural Science Foundation of China(Nos.10435060,10675095)
Thick CrN coatings were deposited on Si (111) substrates by electron source assisted mid-frequency magnetron sputtering working at 40 kHz. The deposition rate, structure, and microhardness of the coatings were stron...