《Microsystems & Nanoengineering》

作品数：969被引量：1077H指数：10
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《Microsystems & Nanoengineering》
主办单位：中国科学院空天信息创新研究院
最新期次：2025年1期更多>>
发文主题：FLUIDMICROFLUIDICSMEMSFLEXIBLEPRINTING更多>>
发文领域：自动化与计算机技术一般工业技术医药卫生理学更多>>
发文基金：国家自然科学基金瑞士科学基金中国博士后科学基金北京市自然科学基金更多>>
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Toolkit for integrating millimeter-sized microfluidic biomedical devices with multiple membranes and electrodes
《Microsystems & Nanoengineering》2025年第1期431-440,共10页Xudong Tao Tobias E.Naegele Etienne Rognin Niamh Willis-Fox Poppy Oldroyd Chaoqun Dong Stefany Kissovsky Antonio Dominguez-Alfaro Santiago Velasco-Bosom Ronan Daly George G.Malliaras 
In recent years,microfluidic systems have evolved to incorporate increasingly complex multi-layer and multi-materialstructures.While conventional 2-dimensional microfluidic systems are typically fabricated with lithog...
关键词：lithographic techniquesthe fabrication techniquessimilarlyalthough reactive ion etching microfluidic geometriesintegrating D printing microfluidic systems membrane integration electrode assembly 
Artificial intelligence-enabled microfluidic cytometer using gravity-driven slug flow for rapid CD4^(+)T cell quantification in whole blood
《Microsystems & Nanoengineering》2025年第1期441-452,共12页Desh Deepak Dixit Tyler P.Graf Kevin J.McHugh Peter B.Lillehoj 
supported in part by the National Institutes of Health(R21CA283852);a Rice University COVID-19 Research Award(U50807).
The quantification of immune cell subpopulations in blood is important for the diagnosis,prognosis and management of various diseases and medical conditions.Flow cytometry is currently the gold standard technique for ...
关键词：microfluidic cytometer gravity driven slug flow cell quantificationhoweverit flow cytometry portable instrumentation whole blood artificial intelligence quantification immune cell subpopulations 
Study of the protrusion of through-silicon vias in dual annealing-CMP processes for 3D integration
《Microsystems & Nanoengineering》2025年第1期453-464,共12页Tianjian Liu Shizhao Wang Fang Dong Yang Xi Yunpeng Zhang Tao He Xiang Sun Sheng Liu 
supported by the National Key R&D Program of China(No.2022YFB3207100);the Hubei Provincial Strategic Scientist Training Plan(No.2022EJD009);the Fundamental Research Funds for the Central Universities(No.2042023kf1041).
The technology of through-silicon via(TSV)is extensively employed for achieving dense 3D integration.TSV facilitates the electrical interconnection of various layers of integrated circuits in a vertical orientation,th...
关键词：silicon vias dual annealing cmp processes phase field model dense d integrationtsv PROTRUSION grain morphology thermal mechanical behavior copper microstructures 
Brain inspired iontronic fluidic memristive and memcapacitive device for self-powered electronics
《Microsystems & Nanoengineering》2025年第1期465-476,共12页Muhammad Umair Khan Bilal Hassan Anas Alazzam Shimaa Eissa Baker Mohammad 
supported by the System on Chip Lab grant from the Khalifa University of Science and Technology under awards Nos.8474000134 and 8474000137.
Ionic fluidic devices are gaining interest due to their role in enabling self-powered neuromorphic computing systems.In this study,we present an approach that integrates an iontronic fluidic memristive(IFM)device with...
关键词：iontronic memristive ionic fluidic devices memcapacitive ff teng s ff teng fluidic triboelectric nanogenerator teng based 
Dual-mode temperature monitoring using high-performance flexible thermocouple sensors based on PEDOT:PSS/CNTs and MXene/Bi_(2)Se_(3)
《Microsystems & Nanoengineering》2025年第1期477-491,共15页Baichuan Sun Gaobin Xu Zhaohui Yang Cunhe Guan Xu Ji Shirong Chen Xing Chen Yuanming Ma Jianguo Feng 
supported by National Key Research and Development Program of China(2022YFB3205903);Anhui Province Science and Technology Innovation Key Project(202423k09020047);the Natural Science Foundation of China(No.2201187);Major R&D Innovation Project of Anhui Provincial Development and Reform Commission(JZ2021AFKJ0050).
Due to the limited thermoelectric(TE)performance of polymer materials and the inherent rigidity of inorganic materials,developing low-cost,highly flexible,and high-performance materials for flexible thermocouple senso...
关键词：ppsn subs flexible thermocouple sensors dual mode temperature monitoring high performance materials flexible thermocouple sensors ftcss remains screen printing polymer materials inorganic materialsdeveloping 
Flexible micromachined ultrasound transducers(MUTs)for biomedical applications
《Microsystems & Nanoengineering》2025年第1期1-21,共21页Sanjog Vilas Joshi Sina Sadeghpour Nadezda Kuznetsova Chen Wang Michael Kraft 
supported by EU EIC Transition under grant agreement ID 101057902,as well as KU Leuven Interdisciplinary Networks(ID-N)under grant No.ZKD-6578。
The use of bulk piezoelectric transducer arrays in medical imaging is a well-established technology that operates based on thickness mode piezoelectric vibration.Meanwhile,advancements in fabrication techniques have l...
关键词：fabrication techniques piezoelectric thin films micromachined alternativesnamelypiezoelectric micromachined ultrasound transducer pmut capacitive micromachined ultrasound transducer cmut thickness mode piezoelectric vibrationmeanwhileadvancements bulk piezoelectric transducer arrays electrostatic forcesrespectivelyin flexural mode 
Microfluidic platforms for monitoringcardiomyocyte electromechanical activity
《Microsystems & Nanoengineering》2025年第1期23-44,共22页Wei Wang Weiguang Su Junlei Han Wei Song Xinyu Li Chonghai Xu Yu Sun Li Wang 
supported by the National Natural Science Foundation of China(NO.62371267,62121003);Key R&D Program of Shandong Province(Major innovation project)(2022CXGC020501);Science,Education and Industry Integration Innovation Pilot Project from Qilu University of Technology(Shandong Academy of Sciences)(NO.2022JBZ02-01);Research Leader Studio in Colleges and Universities of Jinan(NO.2021GXRC083);Innovation Team of Organ-on-a-Chip Manufacturing Key Technologies(NO.202333015,Funded by Jinan Science and Technology Bureau);Young Innovative Talents Introduction&Cultivation Program for Colleges and Universities of Shandong Province(Granted by Department of Education of Shandong Province,Sub-Title 1:Innovative Research Team of High-Performance Integrated Device,Sub-Title 2:Innovative Research Team of Advanced Energy Equipment);Shandong Provincial Natural Science Foundation(ZR2023QH405)。
Cardiovascular diseases account for ~40% of global deaths annually. This situation has revealed the urgent need forthe investigation and development of corresponding drugs for pathogenesis due to the complexity of res...
关键词：cardiac drug screeningand detection techniques microfluidic platforms investigation development corresponding drugs pathogenesis disease modeling accurate fluid control cardiovascular diseases vitro cardiomyocyte model 
Fabrication and modulation of flexible electromagnetic metamaterials
《Microsystems & Nanoengineering》2025年第1期45-64,共20页Yanshuo Feng Misheng Liang Xiaoguang Zhao Rui You 
funded by the National Natural Science Foundation of China(No.62204020);the Beijing Municipal Education Commission Scientific Research Project(No.KM202211232016);the Beijing Outstanding Young Scientist Program(No.JWZQ20240101028);the China Association for Science and Technology Young Outstanding Scientists Funding Program(No.YESS20210023)。
Flexible electromagnetic metamaterials are a potential candidate for the ideal material for electromagnetic control due to their unique physical properties and structure.Flexible electromagnetic metamaterials can be d...
关键词：electromagnetic waves electromagnetic control electromagnetic metamaterials MODULATION FABRICATION MICROWAVE flexible electromagnetic metamaterials 
3D printing of micro-nano devices and their applications
《Microsystems & Nanoengineering》2025年第1期65-87,共23页Naibo Zhang Zilai Wang Zixin Zhao Dongxing Zhang Junyu Feng Linghao Yu Zhanhong Lin Qiuquan Guo Jianming Huang Junfa Mao Jun Yang 
In recent years,the utilization of 3D printing technology in micro and nano device manufacturing has garneredsignificant attention.Advancements in 3D printing have enabled achieving sub-micron level precision.Unlikeco...
关键词：micro nano devices SENSORS flexible electronics microelectronic devices micro nano device manufacturing d printing actuators D printing 
Tunable MEMS-based meta-absorbers for nondispersive infrared gas sensing applications
《Microsystems & Nanoengineering》2025年第1期89-101,共13页Kunye Li Yuhao Liang Yuxin Liu Yu-Sheng Lin 
support from Guangdong Science and Technology Program(2024A0505050007);Guangdong Basic and Applied Basic Research Foundation(2024A1515013019).
In conventional nondispersive infrared(NDIR)gas sensors,a wide-spectrum IR source or detector must be combined with a narrowband filter to eliminate the interference of nontarget gases.Therefore,the multiplexed NDIR g...
关键词：narrowband filter tunable meta absorber plasmonic metamaterials spectral absorption filtersrealizing meta absorber miniaturization integrationalthough narrowband filterswhich MEMS based 
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